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Bibliographic details for 17847090. SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
- Page name: 17847090. SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 4 January 2024 06:21 UTC
- Date retrieved: 16 June 2024 13:55 UTC
- Permanent URL: http://wikipatents.org/index.php?title=17847090._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=25563
- Page Version ID: 25563
Citation styles for 17847090. SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
APA style
17847090. SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.). (2024, January 4). WikiPatents, . Retrieved 13:55, June 16, 2024 from http://wikipatents.org/index.php?title=17847090._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=25563.
MLA style
"17847090. SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)." WikiPatents, . 4 Jan 2024, 06:21 UTC. 16 Jun 2024, 13:55 <http://wikipatents.org/index.php?title=17847090._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=25563>.
MHRA style
WikiPatents contributors, '17847090. SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)', WikiPatents, , 4 January 2024, 06:21 UTC, <http://wikipatents.org/index.php?title=17847090._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=25563> [accessed 16 June 2024]
Chicago style
WikiPatents contributors, "17847090. SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=17847090._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=25563 (accessed June 16, 2024).
CBE/CSE style
WikiPatents contributors. 17847090. SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) [Internet]. WikiPatents, ; 2024 Jan 4, 06:21 UTC [cited 2024 Jun 16]. Available from: http://wikipatents.org/index.php?title=17847090._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=25563.
Bluebook style
17847090. SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.), http://wikipatents.org/index.php?title=17847090._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=25563 (last visited June 16, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "17847090. SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=17847090._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=25563", note = "[Online; accessed 16-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "17847090. SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=17847090._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=25563}", note = "[Online; accessed 16-June-2024]" }