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Bibliographic details for 18372531. SYSTEM AND METHOD FOR TRACKING REAL-TIME POSITION FOR SCANNING OVERLAY METROLOGY simplified abstract (KLA Corporation)

Citation styles for 18372531. SYSTEM AND METHOD FOR TRACKING REAL-TIME POSITION FOR SCANNING OVERLAY METROLOGY simplified abstract (KLA Corporation)

APA style

18372531. SYSTEM AND METHOD FOR TRACKING REAL-TIME POSITION FOR SCANNING OVERLAY METROLOGY simplified abstract (KLA Corporation). (2024, October 18). WikiPatents, . Retrieved 19:36, October 20, 2024 from http://wikipatents.org/index.php?title=18372531._SYSTEM_AND_METHOD_FOR_TRACKING_REAL-TIME_POSITION_FOR_SCANNING_OVERLAY_METROLOGY_simplified_abstract_(KLA_Corporation)&oldid=255325.

MLA style

"18372531. SYSTEM AND METHOD FOR TRACKING REAL-TIME POSITION FOR SCANNING OVERLAY METROLOGY simplified abstract (KLA Corporation)." WikiPatents, . 18 Oct 2024, 05:42 UTC. 20 Oct 2024, 19:36 <http://wikipatents.org/index.php?title=18372531._SYSTEM_AND_METHOD_FOR_TRACKING_REAL-TIME_POSITION_FOR_SCANNING_OVERLAY_METROLOGY_simplified_abstract_(KLA_Corporation)&oldid=255325>.

MHRA style

WikiPatents contributors, '18372531. SYSTEM AND METHOD FOR TRACKING REAL-TIME POSITION FOR SCANNING OVERLAY METROLOGY simplified abstract (KLA Corporation)', WikiPatents, , 18 October 2024, 05:42 UTC, <http://wikipatents.org/index.php?title=18372531._SYSTEM_AND_METHOD_FOR_TRACKING_REAL-TIME_POSITION_FOR_SCANNING_OVERLAY_METROLOGY_simplified_abstract_(KLA_Corporation)&oldid=255325> [accessed 20 October 2024]

Chicago style

WikiPatents contributors, "18372531. SYSTEM AND METHOD FOR TRACKING REAL-TIME POSITION FOR SCANNING OVERLAY METROLOGY simplified abstract (KLA Corporation)," WikiPatents, , http://wikipatents.org/index.php?title=18372531._SYSTEM_AND_METHOD_FOR_TRACKING_REAL-TIME_POSITION_FOR_SCANNING_OVERLAY_METROLOGY_simplified_abstract_(KLA_Corporation)&oldid=255325 (accessed October 20, 2024).

CBE/CSE style

WikiPatents contributors. 18372531. SYSTEM AND METHOD FOR TRACKING REAL-TIME POSITION FOR SCANNING OVERLAY METROLOGY simplified abstract (KLA Corporation) [Internet]. WikiPatents, ; 2024 Oct 18, 05:42 UTC [cited 2024 Oct 20]. Available from: http://wikipatents.org/index.php?title=18372531._SYSTEM_AND_METHOD_FOR_TRACKING_REAL-TIME_POSITION_FOR_SCANNING_OVERLAY_METROLOGY_simplified_abstract_(KLA_Corporation)&oldid=255325.

Bluebook style

18372531. SYSTEM AND METHOD FOR TRACKING REAL-TIME POSITION FOR SCANNING OVERLAY METROLOGY simplified abstract (KLA Corporation), http://wikipatents.org/index.php?title=18372531._SYSTEM_AND_METHOD_FOR_TRACKING_REAL-TIME_POSITION_FOR_SCANNING_OVERLAY_METROLOGY_simplified_abstract_(KLA_Corporation)&oldid=255325 (last visited October 20, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18372531. SYSTEM AND METHOD FOR TRACKING REAL-TIME POSITION FOR SCANNING OVERLAY METROLOGY simplified abstract (KLA Corporation) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18372531._SYSTEM_AND_METHOD_FOR_TRACKING_REAL-TIME_POSITION_FOR_SCANNING_OVERLAY_METROLOGY_simplified_abstract_(KLA_Corporation)&oldid=255325",
   note = "[Online; accessed 20-October-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18372531. SYSTEM AND METHOD FOR TRACKING REAL-TIME POSITION FOR SCANNING OVERLAY METROLOGY simplified abstract (KLA Corporation) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18372531._SYSTEM_AND_METHOD_FOR_TRACKING_REAL-TIME_POSITION_FOR_SCANNING_OVERLAY_METROLOGY_simplified_abstract_(KLA_Corporation)&oldid=255325}",
   note = "[Online; accessed 20-October-2024]"
 }


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