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Bibliographic details for 18624444. PARALLEL SCANNING OVERLAY METROLOGY WITH OPTICAL META-SURFACES simplified abstract (KLA Corporation)
- Page name: 18624444. PARALLEL SCANNING OVERLAY METROLOGY WITH OPTICAL META-SURFACES simplified abstract (KLA Corporation)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 18 October 2024 05:42 UTC
- Date retrieved: 20 October 2024 19:40 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18624444._PARALLEL_SCANNING_OVERLAY_METROLOGY_WITH_OPTICAL_META-SURFACES_simplified_abstract_(KLA_Corporation)&oldid=255321
- Page Version ID: 255321
Citation styles for 18624444. PARALLEL SCANNING OVERLAY METROLOGY WITH OPTICAL META-SURFACES simplified abstract (KLA Corporation)
APA style
18624444. PARALLEL SCANNING OVERLAY METROLOGY WITH OPTICAL META-SURFACES simplified abstract (KLA Corporation). (2024, October 18). WikiPatents, . Retrieved 19:40, October 20, 2024 from http://wikipatents.org/index.php?title=18624444._PARALLEL_SCANNING_OVERLAY_METROLOGY_WITH_OPTICAL_META-SURFACES_simplified_abstract_(KLA_Corporation)&oldid=255321.
MLA style
"18624444. PARALLEL SCANNING OVERLAY METROLOGY WITH OPTICAL META-SURFACES simplified abstract (KLA Corporation)." WikiPatents, . 18 Oct 2024, 05:42 UTC. 20 Oct 2024, 19:40 <http://wikipatents.org/index.php?title=18624444._PARALLEL_SCANNING_OVERLAY_METROLOGY_WITH_OPTICAL_META-SURFACES_simplified_abstract_(KLA_Corporation)&oldid=255321>.
MHRA style
WikiPatents contributors, '18624444. PARALLEL SCANNING OVERLAY METROLOGY WITH OPTICAL META-SURFACES simplified abstract (KLA Corporation)', WikiPatents, , 18 October 2024, 05:42 UTC, <http://wikipatents.org/index.php?title=18624444._PARALLEL_SCANNING_OVERLAY_METROLOGY_WITH_OPTICAL_META-SURFACES_simplified_abstract_(KLA_Corporation)&oldid=255321> [accessed 20 October 2024]
Chicago style
WikiPatents contributors, "18624444. PARALLEL SCANNING OVERLAY METROLOGY WITH OPTICAL META-SURFACES simplified abstract (KLA Corporation)," WikiPatents, , http://wikipatents.org/index.php?title=18624444._PARALLEL_SCANNING_OVERLAY_METROLOGY_WITH_OPTICAL_META-SURFACES_simplified_abstract_(KLA_Corporation)&oldid=255321 (accessed October 20, 2024).
CBE/CSE style
WikiPatents contributors. 18624444. PARALLEL SCANNING OVERLAY METROLOGY WITH OPTICAL META-SURFACES simplified abstract (KLA Corporation) [Internet]. WikiPatents, ; 2024 Oct 18, 05:42 UTC [cited 2024 Oct 20]. Available from: http://wikipatents.org/index.php?title=18624444._PARALLEL_SCANNING_OVERLAY_METROLOGY_WITH_OPTICAL_META-SURFACES_simplified_abstract_(KLA_Corporation)&oldid=255321.
Bluebook style
18624444. PARALLEL SCANNING OVERLAY METROLOGY WITH OPTICAL META-SURFACES simplified abstract (KLA Corporation), http://wikipatents.org/index.php?title=18624444._PARALLEL_SCANNING_OVERLAY_METROLOGY_WITH_OPTICAL_META-SURFACES_simplified_abstract_(KLA_Corporation)&oldid=255321 (last visited October 20, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18624444. PARALLEL SCANNING OVERLAY METROLOGY WITH OPTICAL META-SURFACES simplified abstract (KLA Corporation) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18624444._PARALLEL_SCANNING_OVERLAY_METROLOGY_WITH_OPTICAL_META-SURFACES_simplified_abstract_(KLA_Corporation)&oldid=255321",
note = "[Online; accessed 20-October-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18624444. PARALLEL SCANNING OVERLAY METROLOGY WITH OPTICAL META-SURFACES simplified abstract (KLA Corporation) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18624444._PARALLEL_SCANNING_OVERLAY_METROLOGY_WITH_OPTICAL_META-SURFACES_simplified_abstract_(KLA_Corporation)&oldid=255321}",
note = "[Online; accessed 20-October-2024]"
}
