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Bibliographic details for 18027200. APPARATUS DIAGNOSTIC APPARATUS, SEMICONDUCTOR MANUFACTURING APPARATUS SYSTEM, AND SEMICONDUCTOR APPARATUS MANUFACTURING SYSTEM simplified abstract (HITACHI HIGH-TECH CORPORATION)

Citation styles for 18027200. APPARATUS DIAGNOSTIC APPARATUS, SEMICONDUCTOR MANUFACTURING APPARATUS SYSTEM, AND SEMICONDUCTOR APPARATUS MANUFACTURING SYSTEM simplified abstract (HITACHI HIGH-TECH CORPORATION)

APA style

18027200. APPARATUS DIAGNOSTIC APPARATUS, SEMICONDUCTOR MANUFACTURING APPARATUS SYSTEM, AND SEMICONDUCTOR APPARATUS MANUFACTURING SYSTEM simplified abstract (HITACHI HIGH-TECH CORPORATION). (2024, October 18). WikiPatents, . Retrieved 08:01, October 21, 2024 from http://wikipatents.org/index.php?title=18027200._APPARATUS_DIAGNOSTIC_APPARATUS,_SEMICONDUCTOR_MANUFACTURING_APPARATUS_SYSTEM,_AND_SEMICONDUCTOR_APPARATUS_MANUFACTURING_SYSTEM_simplified_abstract_(HITACHI_HIGH-TECH_CORPORATION)&oldid=255225.

MLA style

"18027200. APPARATUS DIAGNOSTIC APPARATUS, SEMICONDUCTOR MANUFACTURING APPARATUS SYSTEM, AND SEMICONDUCTOR APPARATUS MANUFACTURING SYSTEM simplified abstract (HITACHI HIGH-TECH CORPORATION)." WikiPatents, . 18 Oct 2024, 05:38 UTC. 21 Oct 2024, 08:01 <http://wikipatents.org/index.php?title=18027200._APPARATUS_DIAGNOSTIC_APPARATUS,_SEMICONDUCTOR_MANUFACTURING_APPARATUS_SYSTEM,_AND_SEMICONDUCTOR_APPARATUS_MANUFACTURING_SYSTEM_simplified_abstract_(HITACHI_HIGH-TECH_CORPORATION)&oldid=255225>.

MHRA style

WikiPatents contributors, '18027200. APPARATUS DIAGNOSTIC APPARATUS, SEMICONDUCTOR MANUFACTURING APPARATUS SYSTEM, AND SEMICONDUCTOR APPARATUS MANUFACTURING SYSTEM simplified abstract (HITACHI HIGH-TECH CORPORATION)', WikiPatents, , 18 October 2024, 05:38 UTC, <http://wikipatents.org/index.php?title=18027200._APPARATUS_DIAGNOSTIC_APPARATUS,_SEMICONDUCTOR_MANUFACTURING_APPARATUS_SYSTEM,_AND_SEMICONDUCTOR_APPARATUS_MANUFACTURING_SYSTEM_simplified_abstract_(HITACHI_HIGH-TECH_CORPORATION)&oldid=255225> [accessed 21 October 2024]

Chicago style

WikiPatents contributors, "18027200. APPARATUS DIAGNOSTIC APPARATUS, SEMICONDUCTOR MANUFACTURING APPARATUS SYSTEM, AND SEMICONDUCTOR APPARATUS MANUFACTURING SYSTEM simplified abstract (HITACHI HIGH-TECH CORPORATION)," WikiPatents, , http://wikipatents.org/index.php?title=18027200._APPARATUS_DIAGNOSTIC_APPARATUS,_SEMICONDUCTOR_MANUFACTURING_APPARATUS_SYSTEM,_AND_SEMICONDUCTOR_APPARATUS_MANUFACTURING_SYSTEM_simplified_abstract_(HITACHI_HIGH-TECH_CORPORATION)&oldid=255225 (accessed October 21, 2024).

CBE/CSE style

WikiPatents contributors. 18027200. APPARATUS DIAGNOSTIC APPARATUS, SEMICONDUCTOR MANUFACTURING APPARATUS SYSTEM, AND SEMICONDUCTOR APPARATUS MANUFACTURING SYSTEM simplified abstract (HITACHI HIGH-TECH CORPORATION) [Internet]. WikiPatents, ; 2024 Oct 18, 05:38 UTC [cited 2024 Oct 21]. Available from: http://wikipatents.org/index.php?title=18027200._APPARATUS_DIAGNOSTIC_APPARATUS,_SEMICONDUCTOR_MANUFACTURING_APPARATUS_SYSTEM,_AND_SEMICONDUCTOR_APPARATUS_MANUFACTURING_SYSTEM_simplified_abstract_(HITACHI_HIGH-TECH_CORPORATION)&oldid=255225.

Bluebook style

18027200. APPARATUS DIAGNOSTIC APPARATUS, SEMICONDUCTOR MANUFACTURING APPARATUS SYSTEM, AND SEMICONDUCTOR APPARATUS MANUFACTURING SYSTEM simplified abstract (HITACHI HIGH-TECH CORPORATION), http://wikipatents.org/index.php?title=18027200._APPARATUS_DIAGNOSTIC_APPARATUS,_SEMICONDUCTOR_MANUFACTURING_APPARATUS_SYSTEM,_AND_SEMICONDUCTOR_APPARATUS_MANUFACTURING_SYSTEM_simplified_abstract_(HITACHI_HIGH-TECH_CORPORATION)&oldid=255225 (last visited October 21, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18027200. APPARATUS DIAGNOSTIC APPARATUS, SEMICONDUCTOR MANUFACTURING APPARATUS SYSTEM, AND SEMICONDUCTOR APPARATUS MANUFACTURING SYSTEM simplified abstract (HITACHI HIGH-TECH CORPORATION) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18027200._APPARATUS_DIAGNOSTIC_APPARATUS,_SEMICONDUCTOR_MANUFACTURING_APPARATUS_SYSTEM,_AND_SEMICONDUCTOR_APPARATUS_MANUFACTURING_SYSTEM_simplified_abstract_(HITACHI_HIGH-TECH_CORPORATION)&oldid=255225",
   note = "[Online; accessed 21-October-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18027200. APPARATUS DIAGNOSTIC APPARATUS, SEMICONDUCTOR MANUFACTURING APPARATUS SYSTEM, AND SEMICONDUCTOR APPARATUS MANUFACTURING SYSTEM simplified abstract (HITACHI HIGH-TECH CORPORATION) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18027200._APPARATUS_DIAGNOSTIC_APPARATUS,_SEMICONDUCTOR_MANUFACTURING_APPARATUS_SYSTEM,_AND_SEMICONDUCTOR_APPARATUS_MANUFACTURING_SYSTEM_simplified_abstract_(HITACHI_HIGH-TECH_CORPORATION)&oldid=255225}",
   note = "[Online; accessed 21-October-2024]"
 }


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