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Bibliographic details for 18753192. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA)
- Page name: 18753192. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 18 October 2024 04:05 UTC
- Date retrieved: 19 October 2024 07:38 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18753192._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=253128
- Page Version ID: 253128
Citation styles for 18753192. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA)
APA style
18753192. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA). (2024, October 18). WikiPatents, . Retrieved 07:38, October 19, 2024 from http://wikipatents.org/index.php?title=18753192._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=253128.
MLA style
"18753192. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA)." WikiPatents, . 18 Oct 2024, 04:05 UTC. 19 Oct 2024, 07:38 <http://wikipatents.org/index.php?title=18753192._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=253128>.
MHRA style
WikiPatents contributors, '18753192. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA)', WikiPatents, , 18 October 2024, 04:05 UTC, <http://wikipatents.org/index.php?title=18753192._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=253128> [accessed 19 October 2024]
Chicago style
WikiPatents contributors, "18753192. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA)," WikiPatents, , http://wikipatents.org/index.php?title=18753192._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=253128 (accessed October 19, 2024).
CBE/CSE style
WikiPatents contributors. 18753192. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA) [Internet]. WikiPatents, ; 2024 Oct 18, 04:05 UTC [cited 2024 Oct 19]. Available from: http://wikipatents.org/index.php?title=18753192._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=253128.
Bluebook style
18753192. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA), http://wikipatents.org/index.php?title=18753192._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=253128 (last visited October 19, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18753192. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18753192._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=253128",
note = "[Online; accessed 19-October-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18753192. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18753192._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=253128}",
note = "[Online; accessed 19-October-2024]"
}
