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Bibliographic details for Taiwan semiconductor manufacturing co., ltd. (20240329535). DOSE REDUCTION BOTTOM ANTI-REFLECTIVE COATING FOR METALLIC PHOTORESIST simplified abstract
- Page name: Taiwan semiconductor manufacturing co., ltd. (20240329535). DOSE REDUCTION BOTTOM ANTI-REFLECTIVE COATING FOR METALLIC PHOTORESIST simplified abstract
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 8 October 2024 12:54 UTC
- Date retrieved: 19 October 2024 02:26 UTC
- Permanent URL: http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240329535)._DOSE_REDUCTION_BOTTOM_ANTI-REFLECTIVE_COATING_FOR_METALLIC_PHOTORESIST_simplified_abstract&oldid=247440
- Page Version ID: 247440
Citation styles for Taiwan semiconductor manufacturing co., ltd. (20240329535). DOSE REDUCTION BOTTOM ANTI-REFLECTIVE COATING FOR METALLIC PHOTORESIST simplified abstract
APA style
Taiwan semiconductor manufacturing co., ltd. (20240329535). DOSE REDUCTION BOTTOM ANTI-REFLECTIVE COATING FOR METALLIC PHOTORESIST simplified abstract. (2024, October 8). WikiPatents, . Retrieved 02:26, October 19, 2024 from http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240329535)._DOSE_REDUCTION_BOTTOM_ANTI-REFLECTIVE_COATING_FOR_METALLIC_PHOTORESIST_simplified_abstract&oldid=247440.
MLA style
"Taiwan semiconductor manufacturing co., ltd. (20240329535). DOSE REDUCTION BOTTOM ANTI-REFLECTIVE COATING FOR METALLIC PHOTORESIST simplified abstract." WikiPatents, . 8 Oct 2024, 12:54 UTC. 19 Oct 2024, 02:26 <http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240329535)._DOSE_REDUCTION_BOTTOM_ANTI-REFLECTIVE_COATING_FOR_METALLIC_PHOTORESIST_simplified_abstract&oldid=247440>.
MHRA style
WikiPatents contributors, 'Taiwan semiconductor manufacturing co., ltd. (20240329535). DOSE REDUCTION BOTTOM ANTI-REFLECTIVE COATING FOR METALLIC PHOTORESIST simplified abstract', WikiPatents, , 8 October 2024, 12:54 UTC, <http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240329535)._DOSE_REDUCTION_BOTTOM_ANTI-REFLECTIVE_COATING_FOR_METALLIC_PHOTORESIST_simplified_abstract&oldid=247440> [accessed 19 October 2024]
Chicago style
WikiPatents contributors, "Taiwan semiconductor manufacturing co., ltd. (20240329535). DOSE REDUCTION BOTTOM ANTI-REFLECTIVE COATING FOR METALLIC PHOTORESIST simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240329535)._DOSE_REDUCTION_BOTTOM_ANTI-REFLECTIVE_COATING_FOR_METALLIC_PHOTORESIST_simplified_abstract&oldid=247440 (accessed October 19, 2024).
CBE/CSE style
WikiPatents contributors. Taiwan semiconductor manufacturing co., ltd. (20240329535). DOSE REDUCTION BOTTOM ANTI-REFLECTIVE COATING FOR METALLIC PHOTORESIST simplified abstract [Internet]. WikiPatents, ; 2024 Oct 8, 12:54 UTC [cited 2024 Oct 19]. Available from: http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240329535)._DOSE_REDUCTION_BOTTOM_ANTI-REFLECTIVE_COATING_FOR_METALLIC_PHOTORESIST_simplified_abstract&oldid=247440.
Bluebook style
Taiwan semiconductor manufacturing co., ltd. (20240329535). DOSE REDUCTION BOTTOM ANTI-REFLECTIVE COATING FOR METALLIC PHOTORESIST simplified abstract, http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240329535)._DOSE_REDUCTION_BOTTOM_ANTI-REFLECTIVE_COATING_FOR_METALLIC_PHOTORESIST_simplified_abstract&oldid=247440 (last visited October 19, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "Taiwan semiconductor manufacturing co., ltd. (20240329535). DOSE REDUCTION BOTTOM ANTI-REFLECTIVE COATING FOR METALLIC PHOTORESIST simplified abstract --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240329535)._DOSE_REDUCTION_BOTTOM_ANTI-REFLECTIVE_COATING_FOR_METALLIC_PHOTORESIST_simplified_abstract&oldid=247440",
note = "[Online; accessed 19-October-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "Taiwan semiconductor manufacturing co., ltd. (20240329535). DOSE REDUCTION BOTTOM ANTI-REFLECTIVE COATING FOR METALLIC PHOTORESIST simplified abstract --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240329535)._DOSE_REDUCTION_BOTTOM_ANTI-REFLECTIVE_COATING_FOR_METALLIC_PHOTORESIST_simplified_abstract&oldid=247440}",
note = "[Online; accessed 19-October-2024]"
}
