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Bibliographic details for 18151527. METHOD FOR LITHOGRAPHY IN SEMICONDUCTOR FABRICATION simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)

Citation styles for 18151527. METHOD FOR LITHOGRAPHY IN SEMICONDUCTOR FABRICATION simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)

APA style

18151527. METHOD FOR LITHOGRAPHY IN SEMICONDUCTOR FABRICATION simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.). (2024, January 4). WikiPatents, . Retrieved 01:31, June 20, 2024 from http://wikipatents.org/index.php?title=18151527._METHOD_FOR_LITHOGRAPHY_IN_SEMICONDUCTOR_FABRICATION_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=23601.

MLA style

"18151527. METHOD FOR LITHOGRAPHY IN SEMICONDUCTOR FABRICATION simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)." WikiPatents, . 4 Jan 2024, 01:59 UTC. 20 Jun 2024, 01:31 <http://wikipatents.org/index.php?title=18151527._METHOD_FOR_LITHOGRAPHY_IN_SEMICONDUCTOR_FABRICATION_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=23601>.

MHRA style

WikiPatents contributors, '18151527. METHOD FOR LITHOGRAPHY IN SEMICONDUCTOR FABRICATION simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)', WikiPatents, , 4 January 2024, 01:59 UTC, <http://wikipatents.org/index.php?title=18151527._METHOD_FOR_LITHOGRAPHY_IN_SEMICONDUCTOR_FABRICATION_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=23601> [accessed 20 June 2024]

Chicago style

WikiPatents contributors, "18151527. METHOD FOR LITHOGRAPHY IN SEMICONDUCTOR FABRICATION simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18151527._METHOD_FOR_LITHOGRAPHY_IN_SEMICONDUCTOR_FABRICATION_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=23601 (accessed June 20, 2024).

CBE/CSE style

WikiPatents contributors. 18151527. METHOD FOR LITHOGRAPHY IN SEMICONDUCTOR FABRICATION simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) [Internet]. WikiPatents, ; 2024 Jan 4, 01:59 UTC [cited 2024 Jun 20]. Available from: http://wikipatents.org/index.php?title=18151527._METHOD_FOR_LITHOGRAPHY_IN_SEMICONDUCTOR_FABRICATION_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=23601.

Bluebook style

18151527. METHOD FOR LITHOGRAPHY IN SEMICONDUCTOR FABRICATION simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.), http://wikipatents.org/index.php?title=18151527._METHOD_FOR_LITHOGRAPHY_IN_SEMICONDUCTOR_FABRICATION_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=23601 (last visited June 20, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18151527. METHOD FOR LITHOGRAPHY IN SEMICONDUCTOR FABRICATION simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18151527._METHOD_FOR_LITHOGRAPHY_IN_SEMICONDUCTOR_FABRICATION_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=23601",
   note = "[Online; accessed 20-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18151527. METHOD FOR LITHOGRAPHY IN SEMICONDUCTOR FABRICATION simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18151527._METHOD_FOR_LITHOGRAPHY_IN_SEMICONDUCTOR_FABRICATION_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=23601}",
   note = "[Online; accessed 20-June-2024]"
 }


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