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Bibliographic details for 18151416. EUV MASKS TO PREVENT CARBON CONTAMINATION simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)
- Page name: 18151416. EUV MASKS TO PREVENT CARBON CONTAMINATION simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 4 January 2024 01:58 UTC
- Date retrieved: 16 June 2024 15:43 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18151416._EUV_MASKS_TO_PREVENT_CARBON_CONTAMINATION_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=23598
- Page Version ID: 23598
Citation styles for 18151416. EUV MASKS TO PREVENT CARBON CONTAMINATION simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)
APA style
18151416. EUV MASKS TO PREVENT CARBON CONTAMINATION simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.). (2024, January 4). WikiPatents, . Retrieved 15:43, June 16, 2024 from http://wikipatents.org/index.php?title=18151416._EUV_MASKS_TO_PREVENT_CARBON_CONTAMINATION_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=23598.
MLA style
"18151416. EUV MASKS TO PREVENT CARBON CONTAMINATION simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)." WikiPatents, . 4 Jan 2024, 01:58 UTC. 16 Jun 2024, 15:43 <http://wikipatents.org/index.php?title=18151416._EUV_MASKS_TO_PREVENT_CARBON_CONTAMINATION_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=23598>.
MHRA style
WikiPatents contributors, '18151416. EUV MASKS TO PREVENT CARBON CONTAMINATION simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)', WikiPatents, , 4 January 2024, 01:58 UTC, <http://wikipatents.org/index.php?title=18151416._EUV_MASKS_TO_PREVENT_CARBON_CONTAMINATION_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=23598> [accessed 16 June 2024]
Chicago style
WikiPatents contributors, "18151416. EUV MASKS TO PREVENT CARBON CONTAMINATION simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18151416._EUV_MASKS_TO_PREVENT_CARBON_CONTAMINATION_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=23598 (accessed June 16, 2024).
CBE/CSE style
WikiPatents contributors. 18151416. EUV MASKS TO PREVENT CARBON CONTAMINATION simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) [Internet]. WikiPatents, ; 2024 Jan 4, 01:58 UTC [cited 2024 Jun 16]. Available from: http://wikipatents.org/index.php?title=18151416._EUV_MASKS_TO_PREVENT_CARBON_CONTAMINATION_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=23598.
Bluebook style
18151416. EUV MASKS TO PREVENT CARBON CONTAMINATION simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.), http://wikipatents.org/index.php?title=18151416._EUV_MASKS_TO_PREVENT_CARBON_CONTAMINATION_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=23598 (last visited June 16, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18151416. EUV MASKS TO PREVENT CARBON CONTAMINATION simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18151416._EUV_MASKS_TO_PREVENT_CARBON_CONTAMINATION_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=23598",
note = "[Online; accessed 16-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18151416. EUV MASKS TO PREVENT CARBON CONTAMINATION simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18151416._EUV_MASKS_TO_PREVENT_CARBON_CONTAMINATION_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=23598}",
note = "[Online; accessed 16-June-2024]"
}
