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Bibliographic details for 17679537. CHAMBER WALL POLYMER PROTECTION SYSTEM AND METHOD simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)
- Page name: 17679537. CHAMBER WALL POLYMER PROTECTION SYSTEM AND METHOD simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 4 January 2024 01:58 UTC
- Date retrieved: 29 June 2024 20:58 UTC
- Permanent URL: http://wikipatents.org/index.php?title=17679537._CHAMBER_WALL_POLYMER_PROTECTION_SYSTEM_AND_METHOD_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=23595
- Page Version ID: 23595
Citation styles for 17679537. CHAMBER WALL POLYMER PROTECTION SYSTEM AND METHOD simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)
APA style
17679537. CHAMBER WALL POLYMER PROTECTION SYSTEM AND METHOD simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.). (2024, January 4). WikiPatents, . Retrieved 20:58, June 29, 2024 from http://wikipatents.org/index.php?title=17679537._CHAMBER_WALL_POLYMER_PROTECTION_SYSTEM_AND_METHOD_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=23595.
MLA style
"17679537. CHAMBER WALL POLYMER PROTECTION SYSTEM AND METHOD simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)." WikiPatents, . 4 Jan 2024, 01:58 UTC. 29 Jun 2024, 20:58 <http://wikipatents.org/index.php?title=17679537._CHAMBER_WALL_POLYMER_PROTECTION_SYSTEM_AND_METHOD_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=23595>.
MHRA style
WikiPatents contributors, '17679537. CHAMBER WALL POLYMER PROTECTION SYSTEM AND METHOD simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)', WikiPatents, , 4 January 2024, 01:58 UTC, <http://wikipatents.org/index.php?title=17679537._CHAMBER_WALL_POLYMER_PROTECTION_SYSTEM_AND_METHOD_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=23595> [accessed 29 June 2024]
Chicago style
WikiPatents contributors, "17679537. CHAMBER WALL POLYMER PROTECTION SYSTEM AND METHOD simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=17679537._CHAMBER_WALL_POLYMER_PROTECTION_SYSTEM_AND_METHOD_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=23595 (accessed June 29, 2024).
CBE/CSE style
WikiPatents contributors. 17679537. CHAMBER WALL POLYMER PROTECTION SYSTEM AND METHOD simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) [Internet]. WikiPatents, ; 2024 Jan 4, 01:58 UTC [cited 2024 Jun 29]. Available from: http://wikipatents.org/index.php?title=17679537._CHAMBER_WALL_POLYMER_PROTECTION_SYSTEM_AND_METHOD_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=23595.
Bluebook style
17679537. CHAMBER WALL POLYMER PROTECTION SYSTEM AND METHOD simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.), http://wikipatents.org/index.php?title=17679537._CHAMBER_WALL_POLYMER_PROTECTION_SYSTEM_AND_METHOD_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=23595 (last visited June 29, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "17679537. CHAMBER WALL POLYMER PROTECTION SYSTEM AND METHOD simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=17679537._CHAMBER_WALL_POLYMER_PROTECTION_SYSTEM_AND_METHOD_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=23595", note = "[Online; accessed 29-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "17679537. CHAMBER WALL POLYMER PROTECTION SYSTEM AND METHOD simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=17679537._CHAMBER_WALL_POLYMER_PROTECTION_SYSTEM_AND_METHOD_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=23595}", note = "[Online; accessed 29-June-2024]" }