Cite This Page

Jump to navigation Jump to search

Bibliographic details for 18089691. SUBSTRATE PROCESSING APPARATUS, SIGNAL SOURCE DEVICE, METHOD OF PROCESSING MATERIAL LAYER, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)

Citation styles for 18089691. SUBSTRATE PROCESSING APPARATUS, SIGNAL SOURCE DEVICE, METHOD OF PROCESSING MATERIAL LAYER, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)

APA style

18089691. SUBSTRATE PROCESSING APPARATUS, SIGNAL SOURCE DEVICE, METHOD OF PROCESSING MATERIAL LAYER, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE simplified abstract (SAMSUNG ELECTRONICS CO., LTD.). (2024, January 3). WikiPatents, . Retrieved 06:08, June 21, 2024 from http://wikipatents.org/index.php?title=18089691._SUBSTRATE_PROCESSING_APPARATUS,_SIGNAL_SOURCE_DEVICE,_METHOD_OF_PROCESSING_MATERIAL_LAYER,_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=22163.

MLA style

"18089691. SUBSTRATE PROCESSING APPARATUS, SIGNAL SOURCE DEVICE, METHOD OF PROCESSING MATERIAL LAYER, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)." WikiPatents, . 3 Jan 2024, 02:54 UTC. 21 Jun 2024, 06:08 <http://wikipatents.org/index.php?title=18089691._SUBSTRATE_PROCESSING_APPARATUS,_SIGNAL_SOURCE_DEVICE,_METHOD_OF_PROCESSING_MATERIAL_LAYER,_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=22163>.

MHRA style

WikiPatents contributors, '18089691. SUBSTRATE PROCESSING APPARATUS, SIGNAL SOURCE DEVICE, METHOD OF PROCESSING MATERIAL LAYER, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)', WikiPatents, , 3 January 2024, 02:54 UTC, <http://wikipatents.org/index.php?title=18089691._SUBSTRATE_PROCESSING_APPARATUS,_SIGNAL_SOURCE_DEVICE,_METHOD_OF_PROCESSING_MATERIAL_LAYER,_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=22163> [accessed 21 June 2024]

Chicago style

WikiPatents contributors, "18089691. SUBSTRATE PROCESSING APPARATUS, SIGNAL SOURCE DEVICE, METHOD OF PROCESSING MATERIAL LAYER, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=18089691._SUBSTRATE_PROCESSING_APPARATUS,_SIGNAL_SOURCE_DEVICE,_METHOD_OF_PROCESSING_MATERIAL_LAYER,_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=22163 (accessed June 21, 2024).

CBE/CSE style

WikiPatents contributors. 18089691. SUBSTRATE PROCESSING APPARATUS, SIGNAL SOURCE DEVICE, METHOD OF PROCESSING MATERIAL LAYER, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) [Internet]. WikiPatents, ; 2024 Jan 3, 02:54 UTC [cited 2024 Jun 21]. Available from: http://wikipatents.org/index.php?title=18089691._SUBSTRATE_PROCESSING_APPARATUS,_SIGNAL_SOURCE_DEVICE,_METHOD_OF_PROCESSING_MATERIAL_LAYER,_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=22163.

Bluebook style

18089691. SUBSTRATE PROCESSING APPARATUS, SIGNAL SOURCE DEVICE, METHOD OF PROCESSING MATERIAL LAYER, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE simplified abstract (SAMSUNG ELECTRONICS CO., LTD.), http://wikipatents.org/index.php?title=18089691._SUBSTRATE_PROCESSING_APPARATUS,_SIGNAL_SOURCE_DEVICE,_METHOD_OF_PROCESSING_MATERIAL_LAYER,_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=22163 (last visited June 21, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18089691. SUBSTRATE PROCESSING APPARATUS, SIGNAL SOURCE DEVICE, METHOD OF PROCESSING MATERIAL LAYER, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18089691._SUBSTRATE_PROCESSING_APPARATUS,_SIGNAL_SOURCE_DEVICE,_METHOD_OF_PROCESSING_MATERIAL_LAYER,_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=22163",
   note = "[Online; accessed 21-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18089691. SUBSTRATE PROCESSING APPARATUS, SIGNAL SOURCE DEVICE, METHOD OF PROCESSING MATERIAL LAYER, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18089691._SUBSTRATE_PROCESSING_APPARATUS,_SIGNAL_SOURCE_DEVICE,_METHOD_OF_PROCESSING_MATERIAL_LAYER,_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=22163}",
   note = "[Online; accessed 21-June-2024]"
 }


Retrieved from "http://wikipatents.org/index.php?title=Special:CiteThisPage"