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Bibliographic details for 18413491. SUBSTRATE PROCESSING APPARATUS simplified abstract (Samsung Electronics Co., Ltd.)
- Page name: 18413491. SUBSTRATE PROCESSING APPARATUS simplified abstract (Samsung Electronics Co., Ltd.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 22 August 2024 09:42 UTC
- Date retrieved: 19 September 2024 21:20 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18413491._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=218428
- Page Version ID: 218428
Citation styles for 18413491. SUBSTRATE PROCESSING APPARATUS simplified abstract (Samsung Electronics Co., Ltd.)
APA style
18413491. SUBSTRATE PROCESSING APPARATUS simplified abstract (Samsung Electronics Co., Ltd.). (2024, August 22). WikiPatents, . Retrieved 21:20, September 19, 2024 from http://wikipatents.org/index.php?title=18413491._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=218428.
MLA style
"18413491. SUBSTRATE PROCESSING APPARATUS simplified abstract (Samsung Electronics Co., Ltd.)." WikiPatents, . 22 Aug 2024, 09:42 UTC. 19 Sep 2024, 21:20 <http://wikipatents.org/index.php?title=18413491._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=218428>.
MHRA style
WikiPatents contributors, '18413491. SUBSTRATE PROCESSING APPARATUS simplified abstract (Samsung Electronics Co., Ltd.)', WikiPatents, , 22 August 2024, 09:42 UTC, <http://wikipatents.org/index.php?title=18413491._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=218428> [accessed 19 September 2024]
Chicago style
WikiPatents contributors, "18413491. SUBSTRATE PROCESSING APPARATUS simplified abstract (Samsung Electronics Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18413491._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=218428 (accessed September 19, 2024).
CBE/CSE style
WikiPatents contributors. 18413491. SUBSTRATE PROCESSING APPARATUS simplified abstract (Samsung Electronics Co., Ltd.) [Internet]. WikiPatents, ; 2024 Aug 22, 09:42 UTC [cited 2024 Sep 19]. Available from: http://wikipatents.org/index.php?title=18413491._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=218428.
Bluebook style
18413491. SUBSTRATE PROCESSING APPARATUS simplified abstract (Samsung Electronics Co., Ltd.), http://wikipatents.org/index.php?title=18413491._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=218428 (last visited September 19, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "18413491. SUBSTRATE PROCESSING APPARATUS simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=18413491._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=218428", note = "[Online; accessed 19-September-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "18413491. SUBSTRATE PROCESSING APPARATUS simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=18413491._SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=218428}", note = "[Online; accessed 19-September-2024]" }