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Bibliographic details for 17877439. PLASMA GENERATOR, PLASMA PROCESSING DEVICE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE PLASMA PROCESSING DEVICE simplified abstract (Samsung Electronics Co., Ltd.)

Citation styles for 17877439. PLASMA GENERATOR, PLASMA PROCESSING DEVICE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE PLASMA PROCESSING DEVICE simplified abstract (Samsung Electronics Co., Ltd.)

APA style

17877439. PLASMA GENERATOR, PLASMA PROCESSING DEVICE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE PLASMA PROCESSING DEVICE simplified abstract (Samsung Electronics Co., Ltd.). (2024, January 2). WikiPatents, . Retrieved 21:27, June 15, 2024 from http://wikipatents.org/index.php?title=17877439._PLASMA_GENERATOR,_PLASMA_PROCESSING_DEVICE,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_PLASMA_PROCESSING_DEVICE_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=21612.

MLA style

"17877439. PLASMA GENERATOR, PLASMA PROCESSING DEVICE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE PLASMA PROCESSING DEVICE simplified abstract (Samsung Electronics Co., Ltd.)." WikiPatents, . 2 Jan 2024, 18:31 UTC. 15 Jun 2024, 21:27 <http://wikipatents.org/index.php?title=17877439._PLASMA_GENERATOR,_PLASMA_PROCESSING_DEVICE,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_PLASMA_PROCESSING_DEVICE_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=21612>.

MHRA style

WikiPatents contributors, '17877439. PLASMA GENERATOR, PLASMA PROCESSING DEVICE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE PLASMA PROCESSING DEVICE simplified abstract (Samsung Electronics Co., Ltd.)', WikiPatents, , 2 January 2024, 18:31 UTC, <http://wikipatents.org/index.php?title=17877439._PLASMA_GENERATOR,_PLASMA_PROCESSING_DEVICE,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_PLASMA_PROCESSING_DEVICE_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=21612> [accessed 15 June 2024]

Chicago style

WikiPatents contributors, "17877439. PLASMA GENERATOR, PLASMA PROCESSING DEVICE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE PLASMA PROCESSING DEVICE simplified abstract (Samsung Electronics Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=17877439._PLASMA_GENERATOR,_PLASMA_PROCESSING_DEVICE,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_PLASMA_PROCESSING_DEVICE_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=21612 (accessed June 15, 2024).

CBE/CSE style

WikiPatents contributors. 17877439. PLASMA GENERATOR, PLASMA PROCESSING DEVICE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE PLASMA PROCESSING DEVICE simplified abstract (Samsung Electronics Co., Ltd.) [Internet]. WikiPatents, ; 2024 Jan 2, 18:31 UTC [cited 2024 Jun 15]. Available from: http://wikipatents.org/index.php?title=17877439._PLASMA_GENERATOR,_PLASMA_PROCESSING_DEVICE,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_PLASMA_PROCESSING_DEVICE_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=21612.

Bluebook style

17877439. PLASMA GENERATOR, PLASMA PROCESSING DEVICE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE PLASMA PROCESSING DEVICE simplified abstract (Samsung Electronics Co., Ltd.), http://wikipatents.org/index.php?title=17877439._PLASMA_GENERATOR,_PLASMA_PROCESSING_DEVICE,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_PLASMA_PROCESSING_DEVICE_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=21612 (last visited June 15, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17877439. PLASMA GENERATOR, PLASMA PROCESSING DEVICE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE PLASMA PROCESSING DEVICE simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=17877439._PLASMA_GENERATOR,_PLASMA_PROCESSING_DEVICE,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_PLASMA_PROCESSING_DEVICE_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=21612",
   note = "[Online; accessed 15-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17877439. PLASMA GENERATOR, PLASMA PROCESSING DEVICE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE PLASMA PROCESSING DEVICE simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=17877439._PLASMA_GENERATOR,_PLASMA_PROCESSING_DEVICE,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_PLASMA_PROCESSING_DEVICE_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=21612}",
   note = "[Online; accessed 15-June-2024]"
 }


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