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Bibliographic details for 18411986. COMPOSITIONS FOR POLISHING HARDMASKS AND RELATED SYSTEMS AND METHODS simplified abstract (ENTEGRIS, INC.)

Citation styles for 18411986. COMPOSITIONS FOR POLISHING HARDMASKS AND RELATED SYSTEMS AND METHODS simplified abstract (ENTEGRIS, INC.)

APA style

18411986. COMPOSITIONS FOR POLISHING HARDMASKS AND RELATED SYSTEMS AND METHODS simplified abstract (ENTEGRIS, INC.). (2024, July 26). WikiPatents, . Retrieved 12:36, October 20, 2024 from http://wikipatents.org/index.php?title=18411986._COMPOSITIONS_FOR_POLISHING_HARDMASKS_AND_RELATED_SYSTEMS_AND_METHODS_simplified_abstract_(ENTEGRIS,_INC.)&oldid=206256.

MLA style

"18411986. COMPOSITIONS FOR POLISHING HARDMASKS AND RELATED SYSTEMS AND METHODS simplified abstract (ENTEGRIS, INC.)." WikiPatents, . 26 Jul 2024, 05:09 UTC. 20 Oct 2024, 12:36 <http://wikipatents.org/index.php?title=18411986._COMPOSITIONS_FOR_POLISHING_HARDMASKS_AND_RELATED_SYSTEMS_AND_METHODS_simplified_abstract_(ENTEGRIS,_INC.)&oldid=206256>.

MHRA style

WikiPatents contributors, '18411986. COMPOSITIONS FOR POLISHING HARDMASKS AND RELATED SYSTEMS AND METHODS simplified abstract (ENTEGRIS, INC.)', WikiPatents, , 26 July 2024, 05:09 UTC, <http://wikipatents.org/index.php?title=18411986._COMPOSITIONS_FOR_POLISHING_HARDMASKS_AND_RELATED_SYSTEMS_AND_METHODS_simplified_abstract_(ENTEGRIS,_INC.)&oldid=206256> [accessed 20 October 2024]

Chicago style

WikiPatents contributors, "18411986. COMPOSITIONS FOR POLISHING HARDMASKS AND RELATED SYSTEMS AND METHODS simplified abstract (ENTEGRIS, INC.)," WikiPatents, , http://wikipatents.org/index.php?title=18411986._COMPOSITIONS_FOR_POLISHING_HARDMASKS_AND_RELATED_SYSTEMS_AND_METHODS_simplified_abstract_(ENTEGRIS,_INC.)&oldid=206256 (accessed October 20, 2024).

CBE/CSE style

WikiPatents contributors. 18411986. COMPOSITIONS FOR POLISHING HARDMASKS AND RELATED SYSTEMS AND METHODS simplified abstract (ENTEGRIS, INC.) [Internet]. WikiPatents, ; 2024 Jul 26, 05:09 UTC [cited 2024 Oct 20]. Available from: http://wikipatents.org/index.php?title=18411986._COMPOSITIONS_FOR_POLISHING_HARDMASKS_AND_RELATED_SYSTEMS_AND_METHODS_simplified_abstract_(ENTEGRIS,_INC.)&oldid=206256.

Bluebook style

18411986. COMPOSITIONS FOR POLISHING HARDMASKS AND RELATED SYSTEMS AND METHODS simplified abstract (ENTEGRIS, INC.), http://wikipatents.org/index.php?title=18411986._COMPOSITIONS_FOR_POLISHING_HARDMASKS_AND_RELATED_SYSTEMS_AND_METHODS_simplified_abstract_(ENTEGRIS,_INC.)&oldid=206256 (last visited October 20, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18411986. COMPOSITIONS FOR POLISHING HARDMASKS AND RELATED SYSTEMS AND METHODS simplified abstract (ENTEGRIS, INC.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18411986._COMPOSITIONS_FOR_POLISHING_HARDMASKS_AND_RELATED_SYSTEMS_AND_METHODS_simplified_abstract_(ENTEGRIS,_INC.)&oldid=206256",
   note = "[Online; accessed 20-October-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18411986. COMPOSITIONS FOR POLISHING HARDMASKS AND RELATED SYSTEMS AND METHODS simplified abstract (ENTEGRIS, INC.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18411986._COMPOSITIONS_FOR_POLISHING_HARDMASKS_AND_RELATED_SYSTEMS_AND_METHODS_simplified_abstract_(ENTEGRIS,_INC.)&oldid=206256}",
   note = "[Online; accessed 20-October-2024]"
 }


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