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Bibliographic details for 18402814. SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)

Citation styles for 18402814. SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)

APA style

18402814. SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation). (2024, July 26). WikiPatents, . Retrieved 22:30, October 20, 2024 from http://wikipatents.org/index.php?title=18402814._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_PROCESSING_SUBSTRATE,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_AND_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=206224.

MLA style

"18402814. SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)." WikiPatents, . 26 Jul 2024, 05:07 UTC. 20 Oct 2024, 22:30 <http://wikipatents.org/index.php?title=18402814._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_PROCESSING_SUBSTRATE,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_AND_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=206224>.

MHRA style

WikiPatents contributors, '18402814. SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)', WikiPatents, , 26 July 2024, 05:07 UTC, <http://wikipatents.org/index.php?title=18402814._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_PROCESSING_SUBSTRATE,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_AND_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=206224> [accessed 20 October 2024]

Chicago style

WikiPatents contributors, "18402814. SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)," WikiPatents, , http://wikipatents.org/index.php?title=18402814._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_PROCESSING_SUBSTRATE,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_AND_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=206224 (accessed October 20, 2024).

CBE/CSE style

WikiPatents contributors. 18402814. SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation) [Internet]. WikiPatents, ; 2024 Jul 26, 05:07 UTC [cited 2024 Oct 20]. Available from: http://wikipatents.org/index.php?title=18402814._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_PROCESSING_SUBSTRATE,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_AND_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=206224.

Bluebook style

18402814. SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation), http://wikipatents.org/index.php?title=18402814._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_PROCESSING_SUBSTRATE,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_AND_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=206224 (last visited October 20, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18402814. SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18402814._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_PROCESSING_SUBSTRATE,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_AND_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=206224",
   note = "[Online; accessed 20-October-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18402814. SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18402814._SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_PROCESSING_SUBSTRATE,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_AND_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=206224}",
   note = "[Online; accessed 20-October-2024]"
 }


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