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Bibliographic details for 18612221. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)

Citation styles for 18612221. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)

APA style

18612221. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation). (2024, July 26). WikiPatents, . Retrieved 22:37, October 20, 2024 from http://wikipatents.org/index.php?title=18612221._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=206223.

MLA style

"18612221. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)." WikiPatents, . 26 Jul 2024, 05:07 UTC. 20 Oct 2024, 22:37 <http://wikipatents.org/index.php?title=18612221._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=206223>.

MHRA style

WikiPatents contributors, '18612221. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)', WikiPatents, , 26 July 2024, 05:07 UTC, <http://wikipatents.org/index.php?title=18612221._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=206223> [accessed 20 October 2024]

Chicago style

WikiPatents contributors, "18612221. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)," WikiPatents, , http://wikipatents.org/index.php?title=18612221._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=206223 (accessed October 20, 2024).

CBE/CSE style

WikiPatents contributors. 18612221. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation) [Internet]. WikiPatents, ; 2024 Jul 26, 05:07 UTC [cited 2024 Oct 20]. Available from: http://wikipatents.org/index.php?title=18612221._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=206223.

Bluebook style

18612221. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation), http://wikipatents.org/index.php?title=18612221._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=206223 (last visited October 20, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18612221. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18612221._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=206223",
   note = "[Online; accessed 20-October-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18612221. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18612221._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_NON-TRANSITORY_COMPUTER-READABLE_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=206223}",
   note = "[Online; accessed 20-October-2024]"
 }


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