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Bibliographic details for 18397308. PATTERN EXPOSURE APPARATUS, DEVICE MANUFACTURING METHOD, AND EXPOSURE APPARATUS simplified abstract (Nikon Corporation)

Citation styles for 18397308. PATTERN EXPOSURE APPARATUS, DEVICE MANUFACTURING METHOD, AND EXPOSURE APPARATUS simplified abstract (Nikon Corporation)

APA style

18397308. PATTERN EXPOSURE APPARATUS, DEVICE MANUFACTURING METHOD, AND EXPOSURE APPARATUS simplified abstract (Nikon Corporation). (2024, July 26). WikiPatents, . Retrieved 04:26, October 22, 2024 from http://wikipatents.org/index.php?title=18397308._PATTERN_EXPOSURE_APPARATUS,_DEVICE_MANUFACTURING_METHOD,_AND_EXPOSURE_APPARATUS_simplified_abstract_(Nikon_Corporation)&oldid=205929.

MLA style

"18397308. PATTERN EXPOSURE APPARATUS, DEVICE MANUFACTURING METHOD, AND EXPOSURE APPARATUS simplified abstract (Nikon Corporation)." WikiPatents, . 26 Jul 2024, 04:49 UTC. 22 Oct 2024, 04:26 <http://wikipatents.org/index.php?title=18397308._PATTERN_EXPOSURE_APPARATUS,_DEVICE_MANUFACTURING_METHOD,_AND_EXPOSURE_APPARATUS_simplified_abstract_(Nikon_Corporation)&oldid=205929>.

MHRA style

WikiPatents contributors, '18397308. PATTERN EXPOSURE APPARATUS, DEVICE MANUFACTURING METHOD, AND EXPOSURE APPARATUS simplified abstract (Nikon Corporation)', WikiPatents, , 26 July 2024, 04:49 UTC, <http://wikipatents.org/index.php?title=18397308._PATTERN_EXPOSURE_APPARATUS,_DEVICE_MANUFACTURING_METHOD,_AND_EXPOSURE_APPARATUS_simplified_abstract_(Nikon_Corporation)&oldid=205929> [accessed 22 October 2024]

Chicago style

WikiPatents contributors, "18397308. PATTERN EXPOSURE APPARATUS, DEVICE MANUFACTURING METHOD, AND EXPOSURE APPARATUS simplified abstract (Nikon Corporation)," WikiPatents, , http://wikipatents.org/index.php?title=18397308._PATTERN_EXPOSURE_APPARATUS,_DEVICE_MANUFACTURING_METHOD,_AND_EXPOSURE_APPARATUS_simplified_abstract_(Nikon_Corporation)&oldid=205929 (accessed October 22, 2024).

CBE/CSE style

WikiPatents contributors. 18397308. PATTERN EXPOSURE APPARATUS, DEVICE MANUFACTURING METHOD, AND EXPOSURE APPARATUS simplified abstract (Nikon Corporation) [Internet]. WikiPatents, ; 2024 Jul 26, 04:49 UTC [cited 2024 Oct 22]. Available from: http://wikipatents.org/index.php?title=18397308._PATTERN_EXPOSURE_APPARATUS,_DEVICE_MANUFACTURING_METHOD,_AND_EXPOSURE_APPARATUS_simplified_abstract_(Nikon_Corporation)&oldid=205929.

Bluebook style

18397308. PATTERN EXPOSURE APPARATUS, DEVICE MANUFACTURING METHOD, AND EXPOSURE APPARATUS simplified abstract (Nikon Corporation), http://wikipatents.org/index.php?title=18397308._PATTERN_EXPOSURE_APPARATUS,_DEVICE_MANUFACTURING_METHOD,_AND_EXPOSURE_APPARATUS_simplified_abstract_(Nikon_Corporation)&oldid=205929 (last visited October 22, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18397308. PATTERN EXPOSURE APPARATUS, DEVICE MANUFACTURING METHOD, AND EXPOSURE APPARATUS simplified abstract (Nikon Corporation) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18397308._PATTERN_EXPOSURE_APPARATUS,_DEVICE_MANUFACTURING_METHOD,_AND_EXPOSURE_APPARATUS_simplified_abstract_(Nikon_Corporation)&oldid=205929",
   note = "[Online; accessed 22-October-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18397308. PATTERN EXPOSURE APPARATUS, DEVICE MANUFACTURING METHOD, AND EXPOSURE APPARATUS simplified abstract (Nikon Corporation) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18397308._PATTERN_EXPOSURE_APPARATUS,_DEVICE_MANUFACTURING_METHOD,_AND_EXPOSURE_APPARATUS_simplified_abstract_(Nikon_Corporation)&oldid=205929}",
   note = "[Online; accessed 22-October-2024]"
 }


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