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Bibliographic details for 18505485. Substrate with Film for Reflective Mask Blank, and Reflective Mask Blank simplified abstract (Shin-Etsu Chemical Co., Ltd.)

Citation styles for 18505485. Substrate with Film for Reflective Mask Blank, and Reflective Mask Blank simplified abstract (Shin-Etsu Chemical Co., Ltd.)

APA style

18505485. Substrate with Film for Reflective Mask Blank, and Reflective Mask Blank simplified abstract (Shin-Etsu Chemical Co., Ltd.). (2024, July 26). WikiPatents, . Retrieved 15:48, October 22, 2024 from http://wikipatents.org/index.php?title=18505485._Substrate_with_Film_for_Reflective_Mask_Blank,_and_Reflective_Mask_Blank_simplified_abstract_(Shin-Etsu_Chemical_Co.,_Ltd.)&oldid=205795.

MLA style

"18505485. Substrate with Film for Reflective Mask Blank, and Reflective Mask Blank simplified abstract (Shin-Etsu Chemical Co., Ltd.)." WikiPatents, . 26 Jul 2024, 04:40 UTC. 22 Oct 2024, 15:48 <http://wikipatents.org/index.php?title=18505485._Substrate_with_Film_for_Reflective_Mask_Blank,_and_Reflective_Mask_Blank_simplified_abstract_(Shin-Etsu_Chemical_Co.,_Ltd.)&oldid=205795>.

MHRA style

WikiPatents contributors, '18505485. Substrate with Film for Reflective Mask Blank, and Reflective Mask Blank simplified abstract (Shin-Etsu Chemical Co., Ltd.)', WikiPatents, , 26 July 2024, 04:40 UTC, <http://wikipatents.org/index.php?title=18505485._Substrate_with_Film_for_Reflective_Mask_Blank,_and_Reflective_Mask_Blank_simplified_abstract_(Shin-Etsu_Chemical_Co.,_Ltd.)&oldid=205795> [accessed 22 October 2024]

Chicago style

WikiPatents contributors, "18505485. Substrate with Film for Reflective Mask Blank, and Reflective Mask Blank simplified abstract (Shin-Etsu Chemical Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18505485._Substrate_with_Film_for_Reflective_Mask_Blank,_and_Reflective_Mask_Blank_simplified_abstract_(Shin-Etsu_Chemical_Co.,_Ltd.)&oldid=205795 (accessed October 22, 2024).

CBE/CSE style

WikiPatents contributors. 18505485. Substrate with Film for Reflective Mask Blank, and Reflective Mask Blank simplified abstract (Shin-Etsu Chemical Co., Ltd.) [Internet]. WikiPatents, ; 2024 Jul 26, 04:40 UTC [cited 2024 Oct 22]. Available from: http://wikipatents.org/index.php?title=18505485._Substrate_with_Film_for_Reflective_Mask_Blank,_and_Reflective_Mask_Blank_simplified_abstract_(Shin-Etsu_Chemical_Co.,_Ltd.)&oldid=205795.

Bluebook style

18505485. Substrate with Film for Reflective Mask Blank, and Reflective Mask Blank simplified abstract (Shin-Etsu Chemical Co., Ltd.), http://wikipatents.org/index.php?title=18505485._Substrate_with_Film_for_Reflective_Mask_Blank,_and_Reflective_Mask_Blank_simplified_abstract_(Shin-Etsu_Chemical_Co.,_Ltd.)&oldid=205795 (last visited October 22, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18505485. Substrate with Film for Reflective Mask Blank, and Reflective Mask Blank simplified abstract (Shin-Etsu Chemical Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18505485._Substrate_with_Film_for_Reflective_Mask_Blank,_and_Reflective_Mask_Blank_simplified_abstract_(Shin-Etsu_Chemical_Co.,_Ltd.)&oldid=205795",
   note = "[Online; accessed 22-October-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18505485. Substrate with Film for Reflective Mask Blank, and Reflective Mask Blank simplified abstract (Shin-Etsu Chemical Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18505485._Substrate_with_Film_for_Reflective_Mask_Blank,_and_Reflective_Mask_Blank_simplified_abstract_(Shin-Etsu_Chemical_Co.,_Ltd.)&oldid=205795}",
   note = "[Online; accessed 22-October-2024]"
 }


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