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Bibliographic details for 18562502. SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited)
- Page name: 18562502. SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 26 July 2024 03:50 UTC
- Date retrieved: 19 September 2024 04:10 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18562502._SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=205034
- Page Version ID: 205034
Citation styles for 18562502. SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited)
APA style
18562502. SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited). (2024, July 26). WikiPatents, . Retrieved 04:10, September 19, 2024 from http://wikipatents.org/index.php?title=18562502._SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=205034.
MLA style
"18562502. SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited)." WikiPatents, . 26 Jul 2024, 03:50 UTC. 19 Sep 2024, 04:10 <http://wikipatents.org/index.php?title=18562502._SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=205034>.
MHRA style
WikiPatents contributors, '18562502. SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited)', WikiPatents, , 26 July 2024, 03:50 UTC, <http://wikipatents.org/index.php?title=18562502._SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=205034> [accessed 19 September 2024]
Chicago style
WikiPatents contributors, "18562502. SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited)," WikiPatents, , http://wikipatents.org/index.php?title=18562502._SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=205034 (accessed September 19, 2024).
CBE/CSE style
WikiPatents contributors. 18562502. SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited) [Internet]. WikiPatents, ; 2024 Jul 26, 03:50 UTC [cited 2024 Sep 19]. Available from: http://wikipatents.org/index.php?title=18562502._SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=205034.
Bluebook style
18562502. SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited), http://wikipatents.org/index.php?title=18562502._SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=205034 (last visited September 19, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18562502. SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18562502._SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=205034",
note = "[Online; accessed 19-September-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18562502. SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18562502._SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=205034}",
note = "[Online; accessed 19-September-2024]"
}
