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Bibliographic details for 17704676. SLURRY SUPPLY DEVICE, SUBSTRATE POLISHING APPARATUS, AND SUBSTRATE POLISHING METHOD simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
- Page name: 17704676. SLURRY SUPPLY DEVICE, SUBSTRATE POLISHING APPARATUS, AND SUBSTRATE POLISHING METHOD simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 2 January 2024 05:22 UTC
- Date retrieved: 20 June 2024 05:36 UTC
- Permanent URL: http://wikipatents.org/index.php?title=17704676._SLURRY_SUPPLY_DEVICE,_SUBSTRATE_POLISHING_APPARATUS,_AND_SUBSTRATE_POLISHING_METHOD_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=20441
- Page Version ID: 20441
Citation styles for 17704676. SLURRY SUPPLY DEVICE, SUBSTRATE POLISHING APPARATUS, AND SUBSTRATE POLISHING METHOD simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
APA style
17704676. SLURRY SUPPLY DEVICE, SUBSTRATE POLISHING APPARATUS, AND SUBSTRATE POLISHING METHOD simplified abstract (SAMSUNG ELECTRONICS CO., LTD.). (2024, January 2). WikiPatents, . Retrieved 05:36, June 20, 2024 from http://wikipatents.org/index.php?title=17704676._SLURRY_SUPPLY_DEVICE,_SUBSTRATE_POLISHING_APPARATUS,_AND_SUBSTRATE_POLISHING_METHOD_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=20441.
MLA style
"17704676. SLURRY SUPPLY DEVICE, SUBSTRATE POLISHING APPARATUS, AND SUBSTRATE POLISHING METHOD simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)." WikiPatents, . 2 Jan 2024, 05:22 UTC. 20 Jun 2024, 05:36 <http://wikipatents.org/index.php?title=17704676._SLURRY_SUPPLY_DEVICE,_SUBSTRATE_POLISHING_APPARATUS,_AND_SUBSTRATE_POLISHING_METHOD_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=20441>.
MHRA style
WikiPatents contributors, '17704676. SLURRY SUPPLY DEVICE, SUBSTRATE POLISHING APPARATUS, AND SUBSTRATE POLISHING METHOD simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)', WikiPatents, , 2 January 2024, 05:22 UTC, <http://wikipatents.org/index.php?title=17704676._SLURRY_SUPPLY_DEVICE,_SUBSTRATE_POLISHING_APPARATUS,_AND_SUBSTRATE_POLISHING_METHOD_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=20441> [accessed 20 June 2024]
Chicago style
WikiPatents contributors, "17704676. SLURRY SUPPLY DEVICE, SUBSTRATE POLISHING APPARATUS, AND SUBSTRATE POLISHING METHOD simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=17704676._SLURRY_SUPPLY_DEVICE,_SUBSTRATE_POLISHING_APPARATUS,_AND_SUBSTRATE_POLISHING_METHOD_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=20441 (accessed June 20, 2024).
CBE/CSE style
WikiPatents contributors. 17704676. SLURRY SUPPLY DEVICE, SUBSTRATE POLISHING APPARATUS, AND SUBSTRATE POLISHING METHOD simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) [Internet]. WikiPatents, ; 2024 Jan 2, 05:22 UTC [cited 2024 Jun 20]. Available from: http://wikipatents.org/index.php?title=17704676._SLURRY_SUPPLY_DEVICE,_SUBSTRATE_POLISHING_APPARATUS,_AND_SUBSTRATE_POLISHING_METHOD_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=20441.
Bluebook style
17704676. SLURRY SUPPLY DEVICE, SUBSTRATE POLISHING APPARATUS, AND SUBSTRATE POLISHING METHOD simplified abstract (SAMSUNG ELECTRONICS CO., LTD.), http://wikipatents.org/index.php?title=17704676._SLURRY_SUPPLY_DEVICE,_SUBSTRATE_POLISHING_APPARATUS,_AND_SUBSTRATE_POLISHING_METHOD_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=20441 (last visited June 20, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "17704676. SLURRY SUPPLY DEVICE, SUBSTRATE POLISHING APPARATUS, AND SUBSTRATE POLISHING METHOD simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=17704676._SLURRY_SUPPLY_DEVICE,_SUBSTRATE_POLISHING_APPARATUS,_AND_SUBSTRATE_POLISHING_METHOD_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=20441",
note = "[Online; accessed 20-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "17704676. SLURRY SUPPLY DEVICE, SUBSTRATE POLISHING APPARATUS, AND SUBSTRATE POLISHING METHOD simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=17704676._SLURRY_SUPPLY_DEVICE,_SUBSTRATE_POLISHING_APPARATUS,_AND_SUBSTRATE_POLISHING_METHOD_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=20441}",
note = "[Online; accessed 20-June-2024]"
}
