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Bibliographic details for 17704676. SLURRY SUPPLY DEVICE, SUBSTRATE POLISHING APPARATUS, AND SUBSTRATE POLISHING METHOD simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
- Page name: 17704676. SLURRY SUPPLY DEVICE, SUBSTRATE POLISHING APPARATUS, AND SUBSTRATE POLISHING METHOD simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 2 January 2024 05:22 UTC
- Date retrieved: 23 June 2024 18:39 UTC
- Permanent URL: http://wikipatents.org/index.php?title=17704676._SLURRY_SUPPLY_DEVICE,_SUBSTRATE_POLISHING_APPARATUS,_AND_SUBSTRATE_POLISHING_METHOD_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=20441
- Page Version ID: 20441
Citation styles for 17704676. SLURRY SUPPLY DEVICE, SUBSTRATE POLISHING APPARATUS, AND SUBSTRATE POLISHING METHOD simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
APA style
17704676. SLURRY SUPPLY DEVICE, SUBSTRATE POLISHING APPARATUS, AND SUBSTRATE POLISHING METHOD simplified abstract (SAMSUNG ELECTRONICS CO., LTD.). (2024, January 2). WikiPatents, . Retrieved 18:39, June 23, 2024 from http://wikipatents.org/index.php?title=17704676._SLURRY_SUPPLY_DEVICE,_SUBSTRATE_POLISHING_APPARATUS,_AND_SUBSTRATE_POLISHING_METHOD_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=20441.
MLA style
"17704676. SLURRY SUPPLY DEVICE, SUBSTRATE POLISHING APPARATUS, AND SUBSTRATE POLISHING METHOD simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)." WikiPatents, . 2 Jan 2024, 05:22 UTC. 23 Jun 2024, 18:39 <http://wikipatents.org/index.php?title=17704676._SLURRY_SUPPLY_DEVICE,_SUBSTRATE_POLISHING_APPARATUS,_AND_SUBSTRATE_POLISHING_METHOD_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=20441>.
MHRA style
WikiPatents contributors, '17704676. SLURRY SUPPLY DEVICE, SUBSTRATE POLISHING APPARATUS, AND SUBSTRATE POLISHING METHOD simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)', WikiPatents, , 2 January 2024, 05:22 UTC, <http://wikipatents.org/index.php?title=17704676._SLURRY_SUPPLY_DEVICE,_SUBSTRATE_POLISHING_APPARATUS,_AND_SUBSTRATE_POLISHING_METHOD_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=20441> [accessed 23 June 2024]
Chicago style
WikiPatents contributors, "17704676. SLURRY SUPPLY DEVICE, SUBSTRATE POLISHING APPARATUS, AND SUBSTRATE POLISHING METHOD simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=17704676._SLURRY_SUPPLY_DEVICE,_SUBSTRATE_POLISHING_APPARATUS,_AND_SUBSTRATE_POLISHING_METHOD_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=20441 (accessed June 23, 2024).
CBE/CSE style
WikiPatents contributors. 17704676. SLURRY SUPPLY DEVICE, SUBSTRATE POLISHING APPARATUS, AND SUBSTRATE POLISHING METHOD simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) [Internet]. WikiPatents, ; 2024 Jan 2, 05:22 UTC [cited 2024 Jun 23]. Available from: http://wikipatents.org/index.php?title=17704676._SLURRY_SUPPLY_DEVICE,_SUBSTRATE_POLISHING_APPARATUS,_AND_SUBSTRATE_POLISHING_METHOD_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=20441.
Bluebook style
17704676. SLURRY SUPPLY DEVICE, SUBSTRATE POLISHING APPARATUS, AND SUBSTRATE POLISHING METHOD simplified abstract (SAMSUNG ELECTRONICS CO., LTD.), http://wikipatents.org/index.php?title=17704676._SLURRY_SUPPLY_DEVICE,_SUBSTRATE_POLISHING_APPARATUS,_AND_SUBSTRATE_POLISHING_METHOD_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=20441 (last visited June 23, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "17704676. SLURRY SUPPLY DEVICE, SUBSTRATE POLISHING APPARATUS, AND SUBSTRATE POLISHING METHOD simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=17704676._SLURRY_SUPPLY_DEVICE,_SUBSTRATE_POLISHING_APPARATUS,_AND_SUBSTRATE_POLISHING_METHOD_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=20441",
note = "[Online; accessed 23-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "17704676. SLURRY SUPPLY DEVICE, SUBSTRATE POLISHING APPARATUS, AND SUBSTRATE POLISHING METHOD simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=17704676._SLURRY_SUPPLY_DEVICE,_SUBSTRATE_POLISHING_APPARATUS,_AND_SUBSTRATE_POLISHING_METHOD_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=20441}",
note = "[Online; accessed 23-June-2024]"
}
