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Bibliographic details for 17463328. SYSTEM AND METHOD OF DISCHARGING AN EUV MASK simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)
- Page name: 17463328. SYSTEM AND METHOD OF DISCHARGING AN EUV MASK simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 2 January 2024 04:52 UTC
- Date retrieved: 20 June 2024 13:32 UTC
- Permanent URL: http://wikipatents.org/index.php?title=17463328._SYSTEM_AND_METHOD_OF_DISCHARGING_AN_EUV_MASK_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20303
- Page Version ID: 20303
Citation styles for 17463328. SYSTEM AND METHOD OF DISCHARGING AN EUV MASK simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)
APA style
17463328. SYSTEM AND METHOD OF DISCHARGING AN EUV MASK simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.). (2024, January 2). WikiPatents, . Retrieved 13:32, June 20, 2024 from http://wikipatents.org/index.php?title=17463328._SYSTEM_AND_METHOD_OF_DISCHARGING_AN_EUV_MASK_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20303.
MLA style
"17463328. SYSTEM AND METHOD OF DISCHARGING AN EUV MASK simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)." WikiPatents, . 2 Jan 2024, 04:52 UTC. 20 Jun 2024, 13:32 <http://wikipatents.org/index.php?title=17463328._SYSTEM_AND_METHOD_OF_DISCHARGING_AN_EUV_MASK_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20303>.
MHRA style
WikiPatents contributors, '17463328. SYSTEM AND METHOD OF DISCHARGING AN EUV MASK simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)', WikiPatents, , 2 January 2024, 04:52 UTC, <http://wikipatents.org/index.php?title=17463328._SYSTEM_AND_METHOD_OF_DISCHARGING_AN_EUV_MASK_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20303> [accessed 20 June 2024]
Chicago style
WikiPatents contributors, "17463328. SYSTEM AND METHOD OF DISCHARGING AN EUV MASK simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=17463328._SYSTEM_AND_METHOD_OF_DISCHARGING_AN_EUV_MASK_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20303 (accessed June 20, 2024).
CBE/CSE style
WikiPatents contributors. 17463328. SYSTEM AND METHOD OF DISCHARGING AN EUV MASK simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) [Internet]. WikiPatents, ; 2024 Jan 2, 04:52 UTC [cited 2024 Jun 20]. Available from: http://wikipatents.org/index.php?title=17463328._SYSTEM_AND_METHOD_OF_DISCHARGING_AN_EUV_MASK_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20303.
Bluebook style
17463328. SYSTEM AND METHOD OF DISCHARGING AN EUV MASK simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.), http://wikipatents.org/index.php?title=17463328._SYSTEM_AND_METHOD_OF_DISCHARGING_AN_EUV_MASK_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20303 (last visited June 20, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "17463328. SYSTEM AND METHOD OF DISCHARGING AN EUV MASK simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=17463328._SYSTEM_AND_METHOD_OF_DISCHARGING_AN_EUV_MASK_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20303", note = "[Online; accessed 20-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "17463328. SYSTEM AND METHOD OF DISCHARGING AN EUV MASK simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=17463328._SYSTEM_AND_METHOD_OF_DISCHARGING_AN_EUV_MASK_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20303}", note = "[Online; accessed 20-June-2024]" }