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Bibliographic details for 18434948. SUBSTRATE PROCESSING APPARATUS AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)

Citation styles for 18434948. SUBSTRATE PROCESSING APPARATUS AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)

APA style

18434948. SUBSTRATE PROCESSING APPARATUS AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.). (2024, July 25). WikiPatents, . Retrieved 15:59, September 16, 2024 from http://wikipatents.org/index.php?title=18434948._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=202053.

MLA style

"18434948. SUBSTRATE PROCESSING APPARATUS AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)." WikiPatents, . 25 Jul 2024, 08:30 UTC. 16 Sep 2024, 15:59 <http://wikipatents.org/index.php?title=18434948._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=202053>.

MHRA style

WikiPatents contributors, '18434948. SUBSTRATE PROCESSING APPARATUS AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)', WikiPatents, , 25 July 2024, 08:30 UTC, <http://wikipatents.org/index.php?title=18434948._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=202053> [accessed 16 September 2024]

Chicago style

WikiPatents contributors, "18434948. SUBSTRATE PROCESSING APPARATUS AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=18434948._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=202053 (accessed September 16, 2024).

CBE/CSE style

WikiPatents contributors. 18434948. SUBSTRATE PROCESSING APPARATUS AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) [Internet]. WikiPatents, ; 2024 Jul 25, 08:30 UTC [cited 2024 Sep 16]. Available from: http://wikipatents.org/index.php?title=18434948._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=202053.

Bluebook style

18434948. SUBSTRATE PROCESSING APPARATUS AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.), http://wikipatents.org/index.php?title=18434948._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=202053 (last visited September 16, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18434948. SUBSTRATE PROCESSING APPARATUS AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18434948._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=202053",
   note = "[Online; accessed 16-September-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18434948. SUBSTRATE PROCESSING APPARATUS AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18434948._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=202053}",
   note = "[Online; accessed 16-September-2024]"
 }


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