Cite This Page
Bibliographic details for Samsung electronics co., ltd. (20240248418). SUBSTRATE PROCESSING APPARATUS AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract
- Page name: Samsung electronics co., ltd. (20240248418). SUBSTRATE PROCESSING APPARATUS AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 25 July 2024 05:50 UTC
- Date retrieved: 16 September 2024 15:54 UTC
- Permanent URL: http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240248418)._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=199662
- Page Version ID: 199662
Citation styles for Samsung electronics co., ltd. (20240248418). SUBSTRATE PROCESSING APPARATUS AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract
APA style
Samsung electronics co., ltd. (20240248418). SUBSTRATE PROCESSING APPARATUS AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract. (2024, July 25). WikiPatents, . Retrieved 15:54, September 16, 2024 from http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240248418)._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=199662.
MLA style
"Samsung electronics co., ltd. (20240248418). SUBSTRATE PROCESSING APPARATUS AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract." WikiPatents, . 25 Jul 2024, 05:50 UTC. 16 Sep 2024, 15:54 <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240248418)._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=199662>.
MHRA style
WikiPatents contributors, 'Samsung electronics co., ltd. (20240248418). SUBSTRATE PROCESSING APPARATUS AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract', WikiPatents, , 25 July 2024, 05:50 UTC, <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240248418)._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=199662> [accessed 16 September 2024]
Chicago style
WikiPatents contributors, "Samsung electronics co., ltd. (20240248418). SUBSTRATE PROCESSING APPARATUS AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240248418)._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=199662 (accessed September 16, 2024).
CBE/CSE style
WikiPatents contributors. Samsung electronics co., ltd. (20240248418). SUBSTRATE PROCESSING APPARATUS AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract [Internet]. WikiPatents, ; 2024 Jul 25, 05:50 UTC [cited 2024 Sep 16]. Available from: http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240248418)._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=199662.
Bluebook style
Samsung electronics co., ltd. (20240248418). SUBSTRATE PROCESSING APPARATUS AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract, http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240248418)._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=199662 (last visited September 16, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "Samsung electronics co., ltd. (20240248418). SUBSTRATE PROCESSING APPARATUS AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240248418)._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=199662",
note = "[Online; accessed 16-September-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "Samsung electronics co., ltd. (20240248418). SUBSTRATE PROCESSING APPARATUS AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240248418)._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=199662}",
note = "[Online; accessed 16-September-2024]"
}
