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Bibliographic details for 17951910. PLASMA PROCESSING APPARATUS INCLUDING GAS DISTRIBUTION PLATE simplified abstract (Samsung Electronics Co., Ltd.)
- Page name: 17951910. PLASMA PROCESSING APPARATUS INCLUDING GAS DISTRIBUTION PLATE simplified abstract (Samsung Electronics Co., Ltd.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 2 January 2024 03:22 UTC
- Date retrieved: 29 June 2024 05:55 UTC
- Permanent URL: http://wikipatents.org/index.php?title=17951910._PLASMA_PROCESSING_APPARATUS_INCLUDING_GAS_DISTRIBUTION_PLATE_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=19729
- Page Version ID: 19729
Citation styles for 17951910. PLASMA PROCESSING APPARATUS INCLUDING GAS DISTRIBUTION PLATE simplified abstract (Samsung Electronics Co., Ltd.)
APA style
17951910. PLASMA PROCESSING APPARATUS INCLUDING GAS DISTRIBUTION PLATE simplified abstract (Samsung Electronics Co., Ltd.). (2024, January 2). WikiPatents, . Retrieved 05:55, June 29, 2024 from http://wikipatents.org/index.php?title=17951910._PLASMA_PROCESSING_APPARATUS_INCLUDING_GAS_DISTRIBUTION_PLATE_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=19729.
MLA style
"17951910. PLASMA PROCESSING APPARATUS INCLUDING GAS DISTRIBUTION PLATE simplified abstract (Samsung Electronics Co., Ltd.)." WikiPatents, . 2 Jan 2024, 03:22 UTC. 29 Jun 2024, 05:55 <http://wikipatents.org/index.php?title=17951910._PLASMA_PROCESSING_APPARATUS_INCLUDING_GAS_DISTRIBUTION_PLATE_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=19729>.
MHRA style
WikiPatents contributors, '17951910. PLASMA PROCESSING APPARATUS INCLUDING GAS DISTRIBUTION PLATE simplified abstract (Samsung Electronics Co., Ltd.)', WikiPatents, , 2 January 2024, 03:22 UTC, <http://wikipatents.org/index.php?title=17951910._PLASMA_PROCESSING_APPARATUS_INCLUDING_GAS_DISTRIBUTION_PLATE_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=19729> [accessed 29 June 2024]
Chicago style
WikiPatents contributors, "17951910. PLASMA PROCESSING APPARATUS INCLUDING GAS DISTRIBUTION PLATE simplified abstract (Samsung Electronics Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=17951910._PLASMA_PROCESSING_APPARATUS_INCLUDING_GAS_DISTRIBUTION_PLATE_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=19729 (accessed June 29, 2024).
CBE/CSE style
WikiPatents contributors. 17951910. PLASMA PROCESSING APPARATUS INCLUDING GAS DISTRIBUTION PLATE simplified abstract (Samsung Electronics Co., Ltd.) [Internet]. WikiPatents, ; 2024 Jan 2, 03:22 UTC [cited 2024 Jun 29]. Available from: http://wikipatents.org/index.php?title=17951910._PLASMA_PROCESSING_APPARATUS_INCLUDING_GAS_DISTRIBUTION_PLATE_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=19729.
Bluebook style
17951910. PLASMA PROCESSING APPARATUS INCLUDING GAS DISTRIBUTION PLATE simplified abstract (Samsung Electronics Co., Ltd.), http://wikipatents.org/index.php?title=17951910._PLASMA_PROCESSING_APPARATUS_INCLUDING_GAS_DISTRIBUTION_PLATE_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=19729 (last visited June 29, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "17951910. PLASMA PROCESSING APPARATUS INCLUDING GAS DISTRIBUTION PLATE simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=17951910._PLASMA_PROCESSING_APPARATUS_INCLUDING_GAS_DISTRIBUTION_PLATE_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=19729", note = "[Online; accessed 29-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "17951910. PLASMA PROCESSING APPARATUS INCLUDING GAS DISTRIBUTION PLATE simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=17951910._PLASMA_PROCESSING_APPARATUS_INCLUDING_GAS_DISTRIBUTION_PLATE_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=19729}", note = "[Online; accessed 29-June-2024]" }