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Bibliographic details for 18620262. METHODS AND APPARATUS TO REDUCE EXTREME ULTRAVIOLET LIGHT FOR PHOTOLITHOGRAPHY simplified abstract (Intel Corporation)

Citation styles for 18620262. METHODS AND APPARATUS TO REDUCE EXTREME ULTRAVIOLET LIGHT FOR PHOTOLITHOGRAPHY simplified abstract (Intel Corporation)

APA style

18620262. METHODS AND APPARATUS TO REDUCE EXTREME ULTRAVIOLET LIGHT FOR PHOTOLITHOGRAPHY simplified abstract (Intel Corporation). (2024, July 20). WikiPatents, . Retrieved 02:25, September 16, 2024 from http://wikipatents.org/index.php?title=18620262._METHODS_AND_APPARATUS_TO_REDUCE_EXTREME_ULTRAVIOLET_LIGHT_FOR_PHOTOLITHOGRAPHY_simplified_abstract_(Intel_Corporation)&oldid=177604.

MLA style

"18620262. METHODS AND APPARATUS TO REDUCE EXTREME ULTRAVIOLET LIGHT FOR PHOTOLITHOGRAPHY simplified abstract (Intel Corporation)." WikiPatents, . 20 Jul 2024, 06:39 UTC. 16 Sep 2024, 02:25 <http://wikipatents.org/index.php?title=18620262._METHODS_AND_APPARATUS_TO_REDUCE_EXTREME_ULTRAVIOLET_LIGHT_FOR_PHOTOLITHOGRAPHY_simplified_abstract_(Intel_Corporation)&oldid=177604>.

MHRA style

WikiPatents contributors, '18620262. METHODS AND APPARATUS TO REDUCE EXTREME ULTRAVIOLET LIGHT FOR PHOTOLITHOGRAPHY simplified abstract (Intel Corporation)', WikiPatents, , 20 July 2024, 06:39 UTC, <http://wikipatents.org/index.php?title=18620262._METHODS_AND_APPARATUS_TO_REDUCE_EXTREME_ULTRAVIOLET_LIGHT_FOR_PHOTOLITHOGRAPHY_simplified_abstract_(Intel_Corporation)&oldid=177604> [accessed 16 September 2024]

Chicago style

WikiPatents contributors, "18620262. METHODS AND APPARATUS TO REDUCE EXTREME ULTRAVIOLET LIGHT FOR PHOTOLITHOGRAPHY simplified abstract (Intel Corporation)," WikiPatents, , http://wikipatents.org/index.php?title=18620262._METHODS_AND_APPARATUS_TO_REDUCE_EXTREME_ULTRAVIOLET_LIGHT_FOR_PHOTOLITHOGRAPHY_simplified_abstract_(Intel_Corporation)&oldid=177604 (accessed September 16, 2024).

CBE/CSE style

WikiPatents contributors. 18620262. METHODS AND APPARATUS TO REDUCE EXTREME ULTRAVIOLET LIGHT FOR PHOTOLITHOGRAPHY simplified abstract (Intel Corporation) [Internet]. WikiPatents, ; 2024 Jul 20, 06:39 UTC [cited 2024 Sep 16]. Available from: http://wikipatents.org/index.php?title=18620262._METHODS_AND_APPARATUS_TO_REDUCE_EXTREME_ULTRAVIOLET_LIGHT_FOR_PHOTOLITHOGRAPHY_simplified_abstract_(Intel_Corporation)&oldid=177604.

Bluebook style

18620262. METHODS AND APPARATUS TO REDUCE EXTREME ULTRAVIOLET LIGHT FOR PHOTOLITHOGRAPHY simplified abstract (Intel Corporation), http://wikipatents.org/index.php?title=18620262._METHODS_AND_APPARATUS_TO_REDUCE_EXTREME_ULTRAVIOLET_LIGHT_FOR_PHOTOLITHOGRAPHY_simplified_abstract_(Intel_Corporation)&oldid=177604 (last visited September 16, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18620262. METHODS AND APPARATUS TO REDUCE EXTREME ULTRAVIOLET LIGHT FOR PHOTOLITHOGRAPHY simplified abstract (Intel Corporation) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18620262._METHODS_AND_APPARATUS_TO_REDUCE_EXTREME_ULTRAVIOLET_LIGHT_FOR_PHOTOLITHOGRAPHY_simplified_abstract_(Intel_Corporation)&oldid=177604",
   note = "[Online; accessed 16-September-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18620262. METHODS AND APPARATUS TO REDUCE EXTREME ULTRAVIOLET LIGHT FOR PHOTOLITHOGRAPHY simplified abstract (Intel Corporation) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18620262._METHODS_AND_APPARATUS_TO_REDUCE_EXTREME_ULTRAVIOLET_LIGHT_FOR_PHOTOLITHOGRAPHY_simplified_abstract_(Intel_Corporation)&oldid=177604}",
   note = "[Online; accessed 16-September-2024]"
 }


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