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Bibliographic details for 18402094. CONVEYANCE APPARATUS, CONVEYANCE METHOD, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA)
- Page name: 18402094. CONVEYANCE APPARATUS, CONVEYANCE METHOD, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 20 July 2024 06:37 UTC
- Date retrieved: 16 September 2024 02:26 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18402094._CONVEYANCE_APPARATUS,_CONVEYANCE_METHOD,_LITHOGRAPHY_APPARATUS,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=177546
- Page Version ID: 177546
Citation styles for 18402094. CONVEYANCE APPARATUS, CONVEYANCE METHOD, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA)
APA style
18402094. CONVEYANCE APPARATUS, CONVEYANCE METHOD, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA). (2024, July 20). WikiPatents, . Retrieved 02:26, September 16, 2024 from http://wikipatents.org/index.php?title=18402094._CONVEYANCE_APPARATUS,_CONVEYANCE_METHOD,_LITHOGRAPHY_APPARATUS,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=177546.
MLA style
"18402094. CONVEYANCE APPARATUS, CONVEYANCE METHOD, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA)." WikiPatents, . 20 Jul 2024, 06:37 UTC. 16 Sep 2024, 02:26 <http://wikipatents.org/index.php?title=18402094._CONVEYANCE_APPARATUS,_CONVEYANCE_METHOD,_LITHOGRAPHY_APPARATUS,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=177546>.
MHRA style
WikiPatents contributors, '18402094. CONVEYANCE APPARATUS, CONVEYANCE METHOD, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA)', WikiPatents, , 20 July 2024, 06:37 UTC, <http://wikipatents.org/index.php?title=18402094._CONVEYANCE_APPARATUS,_CONVEYANCE_METHOD,_LITHOGRAPHY_APPARATUS,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=177546> [accessed 16 September 2024]
Chicago style
WikiPatents contributors, "18402094. CONVEYANCE APPARATUS, CONVEYANCE METHOD, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA)," WikiPatents, , http://wikipatents.org/index.php?title=18402094._CONVEYANCE_APPARATUS,_CONVEYANCE_METHOD,_LITHOGRAPHY_APPARATUS,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=177546 (accessed September 16, 2024).
CBE/CSE style
WikiPatents contributors. 18402094. CONVEYANCE APPARATUS, CONVEYANCE METHOD, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA) [Internet]. WikiPatents, ; 2024 Jul 20, 06:37 UTC [cited 2024 Sep 16]. Available from: http://wikipatents.org/index.php?title=18402094._CONVEYANCE_APPARATUS,_CONVEYANCE_METHOD,_LITHOGRAPHY_APPARATUS,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=177546.
Bluebook style
18402094. CONVEYANCE APPARATUS, CONVEYANCE METHOD, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA), http://wikipatents.org/index.php?title=18402094._CONVEYANCE_APPARATUS,_CONVEYANCE_METHOD,_LITHOGRAPHY_APPARATUS,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=177546 (last visited September 16, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18402094. CONVEYANCE APPARATUS, CONVEYANCE METHOD, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18402094._CONVEYANCE_APPARATUS,_CONVEYANCE_METHOD,_LITHOGRAPHY_APPARATUS,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=177546",
note = "[Online; accessed 16-September-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18402094. CONVEYANCE APPARATUS, CONVEYANCE METHOD, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18402094._CONVEYANCE_APPARATUS,_CONVEYANCE_METHOD,_LITHOGRAPHY_APPARATUS,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=177546}",
note = "[Online; accessed 16-September-2024]"
}
