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Bibliographic details for 18194909. IMAGING ELLIPSOMETER AND METHOD OF MEASURING AN OVERLAY ERROR USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)

Citation styles for 18194909. IMAGING ELLIPSOMETER AND METHOD OF MEASURING AN OVERLAY ERROR USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)

APA style

18194909. IMAGING ELLIPSOMETER AND METHOD OF MEASURING AN OVERLAY ERROR USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.). (2024, January 1). WikiPatents, . Retrieved 04:51, September 26, 2024 from http://wikipatents.org/index.php?title=18194909._IMAGING_ELLIPSOMETER_AND_METHOD_OF_MEASURING_AN_OVERLAY_ERROR_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=16805.

MLA style

"18194909. IMAGING ELLIPSOMETER AND METHOD OF MEASURING AN OVERLAY ERROR USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)." WikiPatents, . 1 Jan 2024, 06:10 UTC. 26 Sep 2024, 04:51 <http://wikipatents.org/index.php?title=18194909._IMAGING_ELLIPSOMETER_AND_METHOD_OF_MEASURING_AN_OVERLAY_ERROR_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=16805>.

MHRA style

WikiPatents contributors, '18194909. IMAGING ELLIPSOMETER AND METHOD OF MEASURING AN OVERLAY ERROR USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)', WikiPatents, , 1 January 2024, 06:10 UTC, <http://wikipatents.org/index.php?title=18194909._IMAGING_ELLIPSOMETER_AND_METHOD_OF_MEASURING_AN_OVERLAY_ERROR_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=16805> [accessed 26 September 2024]

Chicago style

WikiPatents contributors, "18194909. IMAGING ELLIPSOMETER AND METHOD OF MEASURING AN OVERLAY ERROR USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=18194909._IMAGING_ELLIPSOMETER_AND_METHOD_OF_MEASURING_AN_OVERLAY_ERROR_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=16805 (accessed September 26, 2024).

CBE/CSE style

WikiPatents contributors. 18194909. IMAGING ELLIPSOMETER AND METHOD OF MEASURING AN OVERLAY ERROR USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) [Internet]. WikiPatents, ; 2024 Jan 1, 06:10 UTC [cited 2024 Sep 26]. Available from: http://wikipatents.org/index.php?title=18194909._IMAGING_ELLIPSOMETER_AND_METHOD_OF_MEASURING_AN_OVERLAY_ERROR_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=16805.

Bluebook style

18194909. IMAGING ELLIPSOMETER AND METHOD OF MEASURING AN OVERLAY ERROR USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.), http://wikipatents.org/index.php?title=18194909._IMAGING_ELLIPSOMETER_AND_METHOD_OF_MEASURING_AN_OVERLAY_ERROR_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=16805 (last visited September 26, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18194909. IMAGING ELLIPSOMETER AND METHOD OF MEASURING AN OVERLAY ERROR USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18194909._IMAGING_ELLIPSOMETER_AND_METHOD_OF_MEASURING_AN_OVERLAY_ERROR_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=16805",
   note = "[Online; accessed 26-September-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18194909. IMAGING ELLIPSOMETER AND METHOD OF MEASURING AN OVERLAY ERROR USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18194909._IMAGING_ELLIPSOMETER_AND_METHOD_OF_MEASURING_AN_OVERLAY_ERROR_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=16805}",
   note = "[Online; accessed 26-September-2024]"
 }


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