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Bibliographic details for 18407631. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract (Samsung Electronics Co., Ltd.)

Citation styles for 18407631. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract (Samsung Electronics Co., Ltd.)

APA style

18407631. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract (Samsung Electronics Co., Ltd.). (2024, July 19). WikiPatents, . Retrieved 13:41, September 15, 2024 from http://wikipatents.org/index.php?title=18407631._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=166658.

MLA style

"18407631. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract (Samsung Electronics Co., Ltd.)." WikiPatents, . 19 Jul 2024, 09:06 UTC. 15 Sep 2024, 13:41 <http://wikipatents.org/index.php?title=18407631._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=166658>.

MHRA style

WikiPatents contributors, '18407631. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract (Samsung Electronics Co., Ltd.)', WikiPatents, , 19 July 2024, 09:06 UTC, <http://wikipatents.org/index.php?title=18407631._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=166658> [accessed 15 September 2024]

Chicago style

WikiPatents contributors, "18407631. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract (Samsung Electronics Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18407631._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=166658 (accessed September 15, 2024).

CBE/CSE style

WikiPatents contributors. 18407631. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract (Samsung Electronics Co., Ltd.) [Internet]. WikiPatents, ; 2024 Jul 19, 09:06 UTC [cited 2024 Sep 15]. Available from: http://wikipatents.org/index.php?title=18407631._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=166658.

Bluebook style

18407631. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract (Samsung Electronics Co., Ltd.), http://wikipatents.org/index.php?title=18407631._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=166658 (last visited September 15, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18407631. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18407631._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=166658",
   note = "[Online; accessed 15-September-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18407631. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18407631._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=166658}",
   note = "[Online; accessed 15-September-2024]"
 }


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