Cite This Page
Bibliographic details for 18528998. METHOD OF MEASURING OVERLAY AND SEMICONDUCTOR DEVICE MANUFACTURED USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)
- Page name: 18528998. METHOD OF MEASURING OVERLAY AND SEMICONDUCTOR DEVICE MANUFACTURED USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 19 July 2024 09:02 UTC
- Date retrieved: 15 September 2024 13:49 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18528998._METHOD_OF_MEASURING_OVERLAY_AND_SEMICONDUCTOR_DEVICE_MANUFACTURED_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=166221
- Page Version ID: 166221
Citation styles for 18528998. METHOD OF MEASURING OVERLAY AND SEMICONDUCTOR DEVICE MANUFACTURED USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)
APA style
18528998. METHOD OF MEASURING OVERLAY AND SEMICONDUCTOR DEVICE MANUFACTURED USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.). (2024, July 19). WikiPatents, . Retrieved 13:49, September 15, 2024 from http://wikipatents.org/index.php?title=18528998._METHOD_OF_MEASURING_OVERLAY_AND_SEMICONDUCTOR_DEVICE_MANUFACTURED_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=166221.
MLA style
"18528998. METHOD OF MEASURING OVERLAY AND SEMICONDUCTOR DEVICE MANUFACTURED USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)." WikiPatents, . 19 Jul 2024, 09:02 UTC. 15 Sep 2024, 13:49 <http://wikipatents.org/index.php?title=18528998._METHOD_OF_MEASURING_OVERLAY_AND_SEMICONDUCTOR_DEVICE_MANUFACTURED_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=166221>.
MHRA style
WikiPatents contributors, '18528998. METHOD OF MEASURING OVERLAY AND SEMICONDUCTOR DEVICE MANUFACTURED USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)', WikiPatents, , 19 July 2024, 09:02 UTC, <http://wikipatents.org/index.php?title=18528998._METHOD_OF_MEASURING_OVERLAY_AND_SEMICONDUCTOR_DEVICE_MANUFACTURED_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=166221> [accessed 15 September 2024]
Chicago style
WikiPatents contributors, "18528998. METHOD OF MEASURING OVERLAY AND SEMICONDUCTOR DEVICE MANUFACTURED USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18528998._METHOD_OF_MEASURING_OVERLAY_AND_SEMICONDUCTOR_DEVICE_MANUFACTURED_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=166221 (accessed September 15, 2024).
CBE/CSE style
WikiPatents contributors. 18528998. METHOD OF MEASURING OVERLAY AND SEMICONDUCTOR DEVICE MANUFACTURED USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) [Internet]. WikiPatents, ; 2024 Jul 19, 09:02 UTC [cited 2024 Sep 15]. Available from: http://wikipatents.org/index.php?title=18528998._METHOD_OF_MEASURING_OVERLAY_AND_SEMICONDUCTOR_DEVICE_MANUFACTURED_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=166221.
Bluebook style
18528998. METHOD OF MEASURING OVERLAY AND SEMICONDUCTOR DEVICE MANUFACTURED USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.), http://wikipatents.org/index.php?title=18528998._METHOD_OF_MEASURING_OVERLAY_AND_SEMICONDUCTOR_DEVICE_MANUFACTURED_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=166221 (last visited September 15, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "18528998. METHOD OF MEASURING OVERLAY AND SEMICONDUCTOR DEVICE MANUFACTURED USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=18528998._METHOD_OF_MEASURING_OVERLAY_AND_SEMICONDUCTOR_DEVICE_MANUFACTURED_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=166221", note = "[Online; accessed 15-September-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "18528998. METHOD OF MEASURING OVERLAY AND SEMICONDUCTOR DEVICE MANUFACTURED USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=18528998._METHOD_OF_MEASURING_OVERLAY_AND_SEMICONDUCTOR_DEVICE_MANUFACTURED_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=166221}", note = "[Online; accessed 15-September-2024]" }