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Bibliographic details for Tokyo electron limited (20240240324). CARBON HARD MASK, FILM FORMING APPARATUS, AND FILM FORMING METHOD simplified abstract

Citation styles for Tokyo electron limited (20240240324). CARBON HARD MASK, FILM FORMING APPARATUS, AND FILM FORMING METHOD simplified abstract

APA style

Tokyo electron limited (20240240324). CARBON HARD MASK, FILM FORMING APPARATUS, AND FILM FORMING METHOD simplified abstract. (2024, July 19). WikiPatents, . Retrieved 03:54, September 16, 2024 from http://wikipatents.org/index.php?title=Tokyo_electron_limited_(20240240324)._CARBON_HARD_MASK,_FILM_FORMING_APPARATUS,_AND_FILM_FORMING_METHOD_simplified_abstract&oldid=165824.

MLA style

"Tokyo electron limited (20240240324). CARBON HARD MASK, FILM FORMING APPARATUS, AND FILM FORMING METHOD simplified abstract." WikiPatents, . 19 Jul 2024, 08:58 UTC. 16 Sep 2024, 03:54 <http://wikipatents.org/index.php?title=Tokyo_electron_limited_(20240240324)._CARBON_HARD_MASK,_FILM_FORMING_APPARATUS,_AND_FILM_FORMING_METHOD_simplified_abstract&oldid=165824>.

MHRA style

WikiPatents contributors, 'Tokyo electron limited (20240240324). CARBON HARD MASK, FILM FORMING APPARATUS, AND FILM FORMING METHOD simplified abstract', WikiPatents, , 19 July 2024, 08:58 UTC, <http://wikipatents.org/index.php?title=Tokyo_electron_limited_(20240240324)._CARBON_HARD_MASK,_FILM_FORMING_APPARATUS,_AND_FILM_FORMING_METHOD_simplified_abstract&oldid=165824> [accessed 16 September 2024]

Chicago style

WikiPatents contributors, "Tokyo electron limited (20240240324). CARBON HARD MASK, FILM FORMING APPARATUS, AND FILM FORMING METHOD simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=Tokyo_electron_limited_(20240240324)._CARBON_HARD_MASK,_FILM_FORMING_APPARATUS,_AND_FILM_FORMING_METHOD_simplified_abstract&oldid=165824 (accessed September 16, 2024).

CBE/CSE style

WikiPatents contributors. Tokyo electron limited (20240240324). CARBON HARD MASK, FILM FORMING APPARATUS, AND FILM FORMING METHOD simplified abstract [Internet]. WikiPatents, ; 2024 Jul 19, 08:58 UTC [cited 2024 Sep 16]. Available from: http://wikipatents.org/index.php?title=Tokyo_electron_limited_(20240240324)._CARBON_HARD_MASK,_FILM_FORMING_APPARATUS,_AND_FILM_FORMING_METHOD_simplified_abstract&oldid=165824.

Bluebook style

Tokyo electron limited (20240240324). CARBON HARD MASK, FILM FORMING APPARATUS, AND FILM FORMING METHOD simplified abstract, http://wikipatents.org/index.php?title=Tokyo_electron_limited_(20240240324)._CARBON_HARD_MASK,_FILM_FORMING_APPARATUS,_AND_FILM_FORMING_METHOD_simplified_abstract&oldid=165824 (last visited September 16, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Tokyo electron limited (20240240324). CARBON HARD MASK, FILM FORMING APPARATUS, AND FILM FORMING METHOD simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=Tokyo_electron_limited_(20240240324)._CARBON_HARD_MASK,_FILM_FORMING_APPARATUS,_AND_FILM_FORMING_METHOD_simplified_abstract&oldid=165824",
   note = "[Online; accessed 16-September-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Tokyo electron limited (20240240324). CARBON HARD MASK, FILM FORMING APPARATUS, AND FILM FORMING METHOD simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=Tokyo_electron_limited_(20240240324)._CARBON_HARD_MASK,_FILM_FORMING_APPARATUS,_AND_FILM_FORMING_METHOD_simplified_abstract&oldid=165824}",
   note = "[Online; accessed 16-September-2024]"
 }


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