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Bibliographic details for 18097540. POLISHING APPARATUS FOR A SUBSTRATE AND POLISHING METHOD FOR A SUBSTRATE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)

Citation styles for 18097540. POLISHING APPARATUS FOR A SUBSTRATE AND POLISHING METHOD FOR A SUBSTRATE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)

APA style

18097540. POLISHING APPARATUS FOR A SUBSTRATE AND POLISHING METHOD FOR A SUBSTRATE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.). (2024, January 1). WikiPatents, . Retrieved 05:45, June 21, 2024 from http://wikipatents.org/index.php?title=18097540._POLISHING_APPARATUS_FOR_A_SUBSTRATE_AND_POLISHING_METHOD_FOR_A_SUBSTRATE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=16459.

MLA style

"18097540. POLISHING APPARATUS FOR A SUBSTRATE AND POLISHING METHOD FOR A SUBSTRATE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)." WikiPatents, . 1 Jan 2024, 05:14 UTC. 21 Jun 2024, 05:45 <http://wikipatents.org/index.php?title=18097540._POLISHING_APPARATUS_FOR_A_SUBSTRATE_AND_POLISHING_METHOD_FOR_A_SUBSTRATE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=16459>.

MHRA style

WikiPatents contributors, '18097540. POLISHING APPARATUS FOR A SUBSTRATE AND POLISHING METHOD FOR A SUBSTRATE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)', WikiPatents, , 1 January 2024, 05:14 UTC, <http://wikipatents.org/index.php?title=18097540._POLISHING_APPARATUS_FOR_A_SUBSTRATE_AND_POLISHING_METHOD_FOR_A_SUBSTRATE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=16459> [accessed 21 June 2024]

Chicago style

WikiPatents contributors, "18097540. POLISHING APPARATUS FOR A SUBSTRATE AND POLISHING METHOD FOR A SUBSTRATE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=18097540._POLISHING_APPARATUS_FOR_A_SUBSTRATE_AND_POLISHING_METHOD_FOR_A_SUBSTRATE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=16459 (accessed June 21, 2024).

CBE/CSE style

WikiPatents contributors. 18097540. POLISHING APPARATUS FOR A SUBSTRATE AND POLISHING METHOD FOR A SUBSTRATE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) [Internet]. WikiPatents, ; 2024 Jan 1, 05:14 UTC [cited 2024 Jun 21]. Available from: http://wikipatents.org/index.php?title=18097540._POLISHING_APPARATUS_FOR_A_SUBSTRATE_AND_POLISHING_METHOD_FOR_A_SUBSTRATE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=16459.

Bluebook style

18097540. POLISHING APPARATUS FOR A SUBSTRATE AND POLISHING METHOD FOR A SUBSTRATE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.), http://wikipatents.org/index.php?title=18097540._POLISHING_APPARATUS_FOR_A_SUBSTRATE_AND_POLISHING_METHOD_FOR_A_SUBSTRATE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=16459 (last visited June 21, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18097540. POLISHING APPARATUS FOR A SUBSTRATE AND POLISHING METHOD FOR A SUBSTRATE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18097540._POLISHING_APPARATUS_FOR_A_SUBSTRATE_AND_POLISHING_METHOD_FOR_A_SUBSTRATE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=16459",
   note = "[Online; accessed 21-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18097540. POLISHING APPARATUS FOR A SUBSTRATE AND POLISHING METHOD FOR A SUBSTRATE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18097540._POLISHING_APPARATUS_FOR_A_SUBSTRATE_AND_POLISHING_METHOD_FOR_A_SUBSTRATE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=16459}",
   note = "[Online; accessed 21-June-2024]"
 }


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