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Bibliographic details for 18361728. LITHOGRAPHY SYSTEM AND METHOD THEREOF simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)
- Page name: 18361728. LITHOGRAPHY SYSTEM AND METHOD THEREOF simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 14 December 2023 12:37 UTC
- Date retrieved: 22 September 2024 18:15 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18361728._LITHOGRAPHY_SYSTEM_AND_METHOD_THEREOF_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16135
- Page Version ID: 16135
Citation styles for 18361728. LITHOGRAPHY SYSTEM AND METHOD THEREOF simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)
APA style
18361728. LITHOGRAPHY SYSTEM AND METHOD THEREOF simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.). (2023, December 14). WikiPatents, . Retrieved 18:15, September 22, 2024 from http://wikipatents.org/index.php?title=18361728._LITHOGRAPHY_SYSTEM_AND_METHOD_THEREOF_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16135.
MLA style
"18361728. LITHOGRAPHY SYSTEM AND METHOD THEREOF simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)." WikiPatents, . 14 Dec 2023, 12:37 UTC. 22 Sep 2024, 18:15 <http://wikipatents.org/index.php?title=18361728._LITHOGRAPHY_SYSTEM_AND_METHOD_THEREOF_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16135>.
MHRA style
WikiPatents contributors, '18361728. LITHOGRAPHY SYSTEM AND METHOD THEREOF simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)', WikiPatents, , 14 December 2023, 12:37 UTC, <http://wikipatents.org/index.php?title=18361728._LITHOGRAPHY_SYSTEM_AND_METHOD_THEREOF_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16135> [accessed 22 September 2024]
Chicago style
WikiPatents contributors, "18361728. LITHOGRAPHY SYSTEM AND METHOD THEREOF simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18361728._LITHOGRAPHY_SYSTEM_AND_METHOD_THEREOF_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16135 (accessed September 22, 2024).
CBE/CSE style
WikiPatents contributors. 18361728. LITHOGRAPHY SYSTEM AND METHOD THEREOF simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) [Internet]. WikiPatents, ; 2023 Dec 14, 12:37 UTC [cited 2024 Sep 22]. Available from: http://wikipatents.org/index.php?title=18361728._LITHOGRAPHY_SYSTEM_AND_METHOD_THEREOF_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16135.
Bluebook style
18361728. LITHOGRAPHY SYSTEM AND METHOD THEREOF simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.), http://wikipatents.org/index.php?title=18361728._LITHOGRAPHY_SYSTEM_AND_METHOD_THEREOF_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16135 (last visited September 22, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18361728. LITHOGRAPHY SYSTEM AND METHOD THEREOF simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) --- WikiPatents{,} ",
year = "2023",
url = "http://wikipatents.org/index.php?title=18361728._LITHOGRAPHY_SYSTEM_AND_METHOD_THEREOF_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16135",
note = "[Online; accessed 22-September-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18361728. LITHOGRAPHY SYSTEM AND METHOD THEREOF simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) --- WikiPatents{,} ",
year = "2023",
url = "\url{http://wikipatents.org/index.php?title=18361728._LITHOGRAPHY_SYSTEM_AND_METHOD_THEREOF_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16135}",
note = "[Online; accessed 22-September-2024]"
}
