Cite This Page
Bibliographic details for 18446400. LITHOGRAPHY SYSTEM AND METHODS simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)
- Page name: 18446400. LITHOGRAPHY SYSTEM AND METHODS simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 14 December 2023 12:37 UTC
- Date retrieved: 26 June 2024 12:11 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18446400._LITHOGRAPHY_SYSTEM_AND_METHODS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16133
- Page Version ID: 16133
Citation styles for 18446400. LITHOGRAPHY SYSTEM AND METHODS simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)
APA style
18446400. LITHOGRAPHY SYSTEM AND METHODS simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.). (2023, December 14). WikiPatents, . Retrieved 12:11, June 26, 2024 from http://wikipatents.org/index.php?title=18446400._LITHOGRAPHY_SYSTEM_AND_METHODS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16133.
MLA style
"18446400. LITHOGRAPHY SYSTEM AND METHODS simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)." WikiPatents, . 14 Dec 2023, 12:37 UTC. 26 Jun 2024, 12:11 <http://wikipatents.org/index.php?title=18446400._LITHOGRAPHY_SYSTEM_AND_METHODS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16133>.
MHRA style
WikiPatents contributors, '18446400. LITHOGRAPHY SYSTEM AND METHODS simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)', WikiPatents, , 14 December 2023, 12:37 UTC, <http://wikipatents.org/index.php?title=18446400._LITHOGRAPHY_SYSTEM_AND_METHODS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16133> [accessed 26 June 2024]
Chicago style
WikiPatents contributors, "18446400. LITHOGRAPHY SYSTEM AND METHODS simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18446400._LITHOGRAPHY_SYSTEM_AND_METHODS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16133 (accessed June 26, 2024).
CBE/CSE style
WikiPatents contributors. 18446400. LITHOGRAPHY SYSTEM AND METHODS simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) [Internet]. WikiPatents, ; 2023 Dec 14, 12:37 UTC [cited 2024 Jun 26]. Available from: http://wikipatents.org/index.php?title=18446400._LITHOGRAPHY_SYSTEM_AND_METHODS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16133.
Bluebook style
18446400. LITHOGRAPHY SYSTEM AND METHODS simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.), http://wikipatents.org/index.php?title=18446400._LITHOGRAPHY_SYSTEM_AND_METHODS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16133 (last visited June 26, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "18446400. LITHOGRAPHY SYSTEM AND METHODS simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) --- WikiPatents{,} ", year = "2023", url = "http://wikipatents.org/index.php?title=18446400._LITHOGRAPHY_SYSTEM_AND_METHODS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16133", note = "[Online; accessed 26-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "18446400. LITHOGRAPHY SYSTEM AND METHODS simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) --- WikiPatents{,} ", year = "2023", url = "\url{http://wikipatents.org/index.php?title=18446400._LITHOGRAPHY_SYSTEM_AND_METHODS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16133}", note = "[Online; accessed 26-June-2024]" }