Cite This Page
Bibliographic details for 17837910. SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)
- Page name: 17837910. SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 14 December 2023 12:36 UTC
- Date retrieved: 27 June 2024 14:46 UTC
- Permanent URL: http://wikipatents.org/index.php?title=17837910._SEMICONDUCTOR_PROCESS_CHAMBER_WITH_IMPROVED_REFLECTOR_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16127
- Page Version ID: 16127
Citation styles for 17837910. SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)
APA style
17837910. SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.). (2023, December 14). WikiPatents, . Retrieved 14:46, June 27, 2024 from http://wikipatents.org/index.php?title=17837910._SEMICONDUCTOR_PROCESS_CHAMBER_WITH_IMPROVED_REFLECTOR_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16127.
MLA style
"17837910. SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)." WikiPatents, . 14 Dec 2023, 12:36 UTC. 27 Jun 2024, 14:46 <http://wikipatents.org/index.php?title=17837910._SEMICONDUCTOR_PROCESS_CHAMBER_WITH_IMPROVED_REFLECTOR_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16127>.
MHRA style
WikiPatents contributors, '17837910. SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)', WikiPatents, , 14 December 2023, 12:36 UTC, <http://wikipatents.org/index.php?title=17837910._SEMICONDUCTOR_PROCESS_CHAMBER_WITH_IMPROVED_REFLECTOR_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16127> [accessed 27 June 2024]
Chicago style
WikiPatents contributors, "17837910. SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=17837910._SEMICONDUCTOR_PROCESS_CHAMBER_WITH_IMPROVED_REFLECTOR_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16127 (accessed June 27, 2024).
CBE/CSE style
WikiPatents contributors. 17837910. SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) [Internet]. WikiPatents, ; 2023 Dec 14, 12:36 UTC [cited 2024 Jun 27]. Available from: http://wikipatents.org/index.php?title=17837910._SEMICONDUCTOR_PROCESS_CHAMBER_WITH_IMPROVED_REFLECTOR_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16127.
Bluebook style
17837910. SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.), http://wikipatents.org/index.php?title=17837910._SEMICONDUCTOR_PROCESS_CHAMBER_WITH_IMPROVED_REFLECTOR_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16127 (last visited June 27, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "17837910. SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) --- WikiPatents{,} ", year = "2023", url = "http://wikipatents.org/index.php?title=17837910._SEMICONDUCTOR_PROCESS_CHAMBER_WITH_IMPROVED_REFLECTOR_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16127", note = "[Online; accessed 27-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "17837910. SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) --- WikiPatents{,} ", year = "2023", url = "\url{http://wikipatents.org/index.php?title=17837910._SEMICONDUCTOR_PROCESS_CHAMBER_WITH_IMPROVED_REFLECTOR_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16127}", note = "[Online; accessed 27-June-2024]" }