Cite This Page

Jump to navigation Jump to search

Bibliographic details for US Patent Application 18359486. Methods of Performing Chemical-Mechanical Polishing Process in Semiconductor Devices simplified abstract

Citation styles for US Patent Application 18359486. Methods of Performing Chemical-Mechanical Polishing Process in Semiconductor Devices simplified abstract

APA style

US Patent Application 18359486. Methods of Performing Chemical-Mechanical Polishing Process in Semiconductor Devices simplified abstract. (2023, December 6). WikiPatents, . Retrieved 04:37, July 3, 2024 from http://wikipatents.org/index.php?title=US_Patent_Application_18359486._Methods_of_Performing_Chemical-Mechanical_Polishing_Process_in_Semiconductor_Devices_simplified_abstract&oldid=14626.

MLA style

"US Patent Application 18359486. Methods of Performing Chemical-Mechanical Polishing Process in Semiconductor Devices simplified abstract." WikiPatents, . 6 Dec 2023, 08:37 UTC. 3 Jul 2024, 04:37 <http://wikipatents.org/index.php?title=US_Patent_Application_18359486._Methods_of_Performing_Chemical-Mechanical_Polishing_Process_in_Semiconductor_Devices_simplified_abstract&oldid=14626>.

MHRA style

WikiPatents contributors, 'US Patent Application 18359486. Methods of Performing Chemical-Mechanical Polishing Process in Semiconductor Devices simplified abstract', WikiPatents, , 6 December 2023, 08:37 UTC, <http://wikipatents.org/index.php?title=US_Patent_Application_18359486._Methods_of_Performing_Chemical-Mechanical_Polishing_Process_in_Semiconductor_Devices_simplified_abstract&oldid=14626> [accessed 3 July 2024]

Chicago style

WikiPatents contributors, "US Patent Application 18359486. Methods of Performing Chemical-Mechanical Polishing Process in Semiconductor Devices simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=US_Patent_Application_18359486._Methods_of_Performing_Chemical-Mechanical_Polishing_Process_in_Semiconductor_Devices_simplified_abstract&oldid=14626 (accessed July 3, 2024).

CBE/CSE style

WikiPatents contributors. US Patent Application 18359486. Methods of Performing Chemical-Mechanical Polishing Process in Semiconductor Devices simplified abstract [Internet]. WikiPatents, ; 2023 Dec 6, 08:37 UTC [cited 2024 Jul 3]. Available from: http://wikipatents.org/index.php?title=US_Patent_Application_18359486._Methods_of_Performing_Chemical-Mechanical_Polishing_Process_in_Semiconductor_Devices_simplified_abstract&oldid=14626.

Bluebook style

US Patent Application 18359486. Methods of Performing Chemical-Mechanical Polishing Process in Semiconductor Devices simplified abstract, http://wikipatents.org/index.php?title=US_Patent_Application_18359486._Methods_of_Performing_Chemical-Mechanical_Polishing_Process_in_Semiconductor_Devices_simplified_abstract&oldid=14626 (last visited July 3, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "US Patent Application 18359486. Methods of Performing Chemical-Mechanical Polishing Process in Semiconductor Devices simplified abstract --- WikiPatents{,} ",
   year = "2023",
   url = "http://wikipatents.org/index.php?title=US_Patent_Application_18359486._Methods_of_Performing_Chemical-Mechanical_Polishing_Process_in_Semiconductor_Devices_simplified_abstract&oldid=14626",
   note = "[Online; accessed 3-July-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "US Patent Application 18359486. Methods of Performing Chemical-Mechanical Polishing Process in Semiconductor Devices simplified abstract --- WikiPatents{,} ",
   year = "2023",
   url = "\url{http://wikipatents.org/index.php?title=US_Patent_Application_18359486._Methods_of_Performing_Chemical-Mechanical_Polishing_Process_in_Semiconductor_Devices_simplified_abstract&oldid=14626}",
   note = "[Online; accessed 3-July-2024]"
 }


Retrieved from "http://wikipatents.org/index.php?title=Special:CiteThisPage"