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Bibliographic details for Samsung electronics co., ltd. (20240242985). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract

Citation styles for Samsung electronics co., ltd. (20240242985). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract

APA style

Samsung electronics co., ltd. (20240242985). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract. (2024, July 18). WikiPatents, . Retrieved 13:25, September 15, 2024 from http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240242985)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=129322.

MLA style

"Samsung electronics co., ltd. (20240242985). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract." WikiPatents, . 18 Jul 2024, 05:34 UTC. 15 Sep 2024, 13:25 <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240242985)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=129322>.

MHRA style

WikiPatents contributors, 'Samsung electronics co., ltd. (20240242985). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract', WikiPatents, , 18 July 2024, 05:34 UTC, <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240242985)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=129322> [accessed 15 September 2024]

Chicago style

WikiPatents contributors, "Samsung electronics co., ltd. (20240242985). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240242985)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=129322 (accessed September 15, 2024).

CBE/CSE style

WikiPatents contributors. Samsung electronics co., ltd. (20240242985). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract [Internet]. WikiPatents, ; 2024 Jul 18, 05:34 UTC [cited 2024 Sep 15]. Available from: http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240242985)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=129322.

Bluebook style

Samsung electronics co., ltd. (20240242985). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract, http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240242985)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=129322 (last visited September 15, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Samsung electronics co., ltd. (20240242985). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240242985)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=129322",
   note = "[Online; accessed 15-September-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Samsung electronics co., ltd. (20240242985). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240242985)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=129322}",
   note = "[Online; accessed 15-September-2024]"
 }


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