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Bibliographic details for US Patent Application 18361891. EUV PHOTOMASK AND MANUFACTURING METHOD OF THE SAME simplified abstract
- Page name: US Patent Application 18361891. EUV PHOTOMASK AND MANUFACTURING METHOD OF THE SAME simplified abstract
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 4 December 2023 06:48 UTC
- Date retrieved: 27 June 2024 13:52 UTC
- Permanent URL: http://wikipatents.org/index.php?title=US_Patent_Application_18361891._EUV_PHOTOMASK_AND_MANUFACTURING_METHOD_OF_THE_SAME_simplified_abstract&oldid=11308
- Page Version ID: 11308
Citation styles for US Patent Application 18361891. EUV PHOTOMASK AND MANUFACTURING METHOD OF THE SAME simplified abstract
APA style
US Patent Application 18361891. EUV PHOTOMASK AND MANUFACTURING METHOD OF THE SAME simplified abstract. (2023, December 4). WikiPatents, . Retrieved 13:52, June 27, 2024 from http://wikipatents.org/index.php?title=US_Patent_Application_18361891._EUV_PHOTOMASK_AND_MANUFACTURING_METHOD_OF_THE_SAME_simplified_abstract&oldid=11308.
MLA style
"US Patent Application 18361891. EUV PHOTOMASK AND MANUFACTURING METHOD OF THE SAME simplified abstract." WikiPatents, . 4 Dec 2023, 06:48 UTC. 27 Jun 2024, 13:52 <http://wikipatents.org/index.php?title=US_Patent_Application_18361891._EUV_PHOTOMASK_AND_MANUFACTURING_METHOD_OF_THE_SAME_simplified_abstract&oldid=11308>.
MHRA style
WikiPatents contributors, 'US Patent Application 18361891. EUV PHOTOMASK AND MANUFACTURING METHOD OF THE SAME simplified abstract', WikiPatents, , 4 December 2023, 06:48 UTC, <http://wikipatents.org/index.php?title=US_Patent_Application_18361891._EUV_PHOTOMASK_AND_MANUFACTURING_METHOD_OF_THE_SAME_simplified_abstract&oldid=11308> [accessed 27 June 2024]
Chicago style
WikiPatents contributors, "US Patent Application 18361891. EUV PHOTOMASK AND MANUFACTURING METHOD OF THE SAME simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=US_Patent_Application_18361891._EUV_PHOTOMASK_AND_MANUFACTURING_METHOD_OF_THE_SAME_simplified_abstract&oldid=11308 (accessed June 27, 2024).
CBE/CSE style
WikiPatents contributors. US Patent Application 18361891. EUV PHOTOMASK AND MANUFACTURING METHOD OF THE SAME simplified abstract [Internet]. WikiPatents, ; 2023 Dec 4, 06:48 UTC [cited 2024 Jun 27]. Available from: http://wikipatents.org/index.php?title=US_Patent_Application_18361891._EUV_PHOTOMASK_AND_MANUFACTURING_METHOD_OF_THE_SAME_simplified_abstract&oldid=11308.
Bluebook style
US Patent Application 18361891. EUV PHOTOMASK AND MANUFACTURING METHOD OF THE SAME simplified abstract, http://wikipatents.org/index.php?title=US_Patent_Application_18361891._EUV_PHOTOMASK_AND_MANUFACTURING_METHOD_OF_THE_SAME_simplified_abstract&oldid=11308 (last visited June 27, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "US Patent Application 18361891. EUV PHOTOMASK AND MANUFACTURING METHOD OF THE SAME simplified abstract --- WikiPatents{,} ",
year = "2023",
url = "http://wikipatents.org/index.php?title=US_Patent_Application_18361891._EUV_PHOTOMASK_AND_MANUFACTURING_METHOD_OF_THE_SAME_simplified_abstract&oldid=11308",
note = "[Online; accessed 27-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "US Patent Application 18361891. EUV PHOTOMASK AND MANUFACTURING METHOD OF THE SAME simplified abstract --- WikiPatents{,} ",
year = "2023",
url = "\url{http://wikipatents.org/index.php?title=US_Patent_Application_18361891._EUV_PHOTOMASK_AND_MANUFACTURING_METHOD_OF_THE_SAME_simplified_abstract&oldid=11308}",
note = "[Online; accessed 27-June-2024]"
}
