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Bibliographic details for US Patent Application 18231173. EUV WAFER DEFECT IMPROVEMENT AND METHOD OF COLLECTING NONCONDUCTIVE PARTICLES simplified abstract

Citation styles for US Patent Application 18231173. EUV WAFER DEFECT IMPROVEMENT AND METHOD OF COLLECTING NONCONDUCTIVE PARTICLES simplified abstract

APA style

US Patent Application 18231173. EUV WAFER DEFECT IMPROVEMENT AND METHOD OF COLLECTING NONCONDUCTIVE PARTICLES simplified abstract. (2023, December 4). WikiPatents, . Retrieved 18:44, September 24, 2024 from http://wikipatents.org/index.php?title=US_Patent_Application_18231173._EUV_WAFER_DEFECT_IMPROVEMENT_AND_METHOD_OF_COLLECTING_NONCONDUCTIVE_PARTICLES_simplified_abstract&oldid=10555.

MLA style

"US Patent Application 18231173. EUV WAFER DEFECT IMPROVEMENT AND METHOD OF COLLECTING NONCONDUCTIVE PARTICLES simplified abstract." WikiPatents, . 4 Dec 2023, 03:58 UTC. 24 Sep 2024, 18:44 <http://wikipatents.org/index.php?title=US_Patent_Application_18231173._EUV_WAFER_DEFECT_IMPROVEMENT_AND_METHOD_OF_COLLECTING_NONCONDUCTIVE_PARTICLES_simplified_abstract&oldid=10555>.

MHRA style

WikiPatents contributors, 'US Patent Application 18231173. EUV WAFER DEFECT IMPROVEMENT AND METHOD OF COLLECTING NONCONDUCTIVE PARTICLES simplified abstract', WikiPatents, , 4 December 2023, 03:58 UTC, <http://wikipatents.org/index.php?title=US_Patent_Application_18231173._EUV_WAFER_DEFECT_IMPROVEMENT_AND_METHOD_OF_COLLECTING_NONCONDUCTIVE_PARTICLES_simplified_abstract&oldid=10555> [accessed 24 September 2024]

Chicago style

WikiPatents contributors, "US Patent Application 18231173. EUV WAFER DEFECT IMPROVEMENT AND METHOD OF COLLECTING NONCONDUCTIVE PARTICLES simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=US_Patent_Application_18231173._EUV_WAFER_DEFECT_IMPROVEMENT_AND_METHOD_OF_COLLECTING_NONCONDUCTIVE_PARTICLES_simplified_abstract&oldid=10555 (accessed September 24, 2024).

CBE/CSE style

WikiPatents contributors. US Patent Application 18231173. EUV WAFER DEFECT IMPROVEMENT AND METHOD OF COLLECTING NONCONDUCTIVE PARTICLES simplified abstract [Internet]. WikiPatents, ; 2023 Dec 4, 03:58 UTC [cited 2024 Sep 24]. Available from: http://wikipatents.org/index.php?title=US_Patent_Application_18231173._EUV_WAFER_DEFECT_IMPROVEMENT_AND_METHOD_OF_COLLECTING_NONCONDUCTIVE_PARTICLES_simplified_abstract&oldid=10555.

Bluebook style

US Patent Application 18231173. EUV WAFER DEFECT IMPROVEMENT AND METHOD OF COLLECTING NONCONDUCTIVE PARTICLES simplified abstract, http://wikipatents.org/index.php?title=US_Patent_Application_18231173._EUV_WAFER_DEFECT_IMPROVEMENT_AND_METHOD_OF_COLLECTING_NONCONDUCTIVE_PARTICLES_simplified_abstract&oldid=10555 (last visited September 24, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "US Patent Application 18231173. EUV WAFER DEFECT IMPROVEMENT AND METHOD OF COLLECTING NONCONDUCTIVE PARTICLES simplified abstract --- WikiPatents{,} ",
   year = "2023",
   url = "http://wikipatents.org/index.php?title=US_Patent_Application_18231173._EUV_WAFER_DEFECT_IMPROVEMENT_AND_METHOD_OF_COLLECTING_NONCONDUCTIVE_PARTICLES_simplified_abstract&oldid=10555",
   note = "[Online; accessed 24-September-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "US Patent Application 18231173. EUV WAFER DEFECT IMPROVEMENT AND METHOD OF COLLECTING NONCONDUCTIVE PARTICLES simplified abstract --- WikiPatents{,} ",
   year = "2023",
   url = "\url{http://wikipatents.org/index.php?title=US_Patent_Application_18231173._EUV_WAFER_DEFECT_IMPROVEMENT_AND_METHOD_OF_COLLECTING_NONCONDUCTIVE_PARTICLES_simplified_abstract&oldid=10555}",
   note = "[Online; accessed 24-September-2024]"
 }


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