Applied materials, inc. (20250069926). INTEGRATED SUBSTRATE PROCESSING SYSTEM WITH ADVANCED SUBSTRATE HANDLING ROBOT

INTEGRATED SUBSTRATE PROCESSING SYSTEM WITH ADVANCED SUBSTRATE HANDLING ROBOT

Organization Name

applied materials, inc.

Inventor(s)

Arunkumar Ramachandraiah of Bengaluru (IN)

Paul Reuter of Austin TX (US)

Devendra Holeyannavar of Bangalore (IN)

Steven Trey Tindel of Austin TX (US)

Dean Hruzek of Cedar Park TX (US)

Jeffrey Hudgens of San Francisco CA (US)

Maureen Breiling of Campbell CA (US)

Venkatesh Chinnaplar Rajappa of Bengaluru (IN)

Micah E. Klaeser of San Jose CA (US)

Benjamin Johnston of Los Gatos CA (US)

Alton Wang of Taichung City (TW)

Wei Siang Chao of Tainan City (TW)

Chandrakant Sapkale of Bangalore (IN)

Shiva Prasad Kota of Bengaluru (IN)

Latha Ramesh of Bangalore (IN)

INTEGRATED SUBSTRATE PROCESSING SYSTEM WITH ADVANCED SUBSTRATE HANDLING ROBOT

This abstract first appeared for US patent application 20250069926 titled 'INTEGRATED SUBSTRATE PROCESSING SYSTEM WITH ADVANCED SUBSTRATE HANDLING ROBOT

Original Abstract Submitted

integrated substrate processing systems are disclosed that are able to achieve high-volume processing of substrates (e.g., greater than 120 substrates per hour) using environmentally sensitive processes and/or tools, such as photolithography processes and/or tools. in some embodiments, for example, the integrated substrate processing system may include an efem and a processing tool enclosure that are coupled together to form an integrated processing environment. the integrated substrate processing system may operate to maintain substantially uniform conditions (e.g., at a uniform temperature and relative humidity) throughout the integrated environment, and in some embodiments, may utilize an external air source, such as a remote air module (ram), in order to do so. in some embodiments, high-volume processing of substrates may be further facilitated by employing specialized substrate handling robots and/or specially adapting the efem and/or processing tool enclosure.