Shin-Etsu Chemical Co., Ltd. patent applications published on July 25th, 2024

Summary of the patent applications from Shin-Etsu Chemical Co., Ltd. on July 25th, 2024

1. **Summary**: Shin-Etsu Chemical Co., Ltd. has recently filed patents for innovative technologies in the field of optical elements and semiconductor devices. These patents include advancements in Q-switch structures, window materials for optical elements, high-performance crystalline oxide films, and reflective mask blanks for semiconductor lithography. The key features of these patents include the integration of solid-state laser medium with magneto-optical material, synthetic quartz glass substrates with antireflection films, gallium oxide films with excellent crystallinity, and multilayer reflection films for semiconductor lithography. These technologies offer benefits such as improved optical output, high light transmittance, enhanced semiconductor properties, and increased durability in various applications.

2. **Key Points of Patents**:

  * Q-switch structure integrating solid-state laser medium and magneto-optical material.
  * Window material for optical elements made of synthetic quartz glass with antireflection film.
  * Laminated structure with gallium oxide film for semiconductor devices.
  * Substrate with film for reflective mask blank in semiconductor lithography.

3. **Notable Applications**:

  * Optical elements for aerospace, automotive, and medical devices.
  * Semiconductor devices, optical coatings, and electronic applications.
  * Optoelectronic devices, semiconductor manufacturing, solar panels, and optical equipment.
  * Reflective mask blanks for semiconductor lithography processes.

Patent applications for Shin-Etsu Chemical Co., Ltd. on July 25th, 2024

SCANNING REDUCED PROJECTION OPTICAL SYSTEM AND LASER PROCESSING APPARATUS USING THE SAME (18576704)

Main Inventor

Hiroshi Yamaoka

THIOEPOXY GROUP- AND (METH)ALLYL GROUP-CONTAINING COMPOUND, AND METHOD FOR PRODUCING SAME (18558595)

Main Inventor

Hideyoshi Yanagisawa

CURABLE MALEIMIDE RESIN COMPOSITION, ADHESIVE, PRIMER, CHIP COATING AGENT, AND SEMICONDUCTOR DEVICE (18409377)

Main Inventor

Yoshihiro TSUTSUMI

Conductive Material Composition, Conductive Film, And Method For Forming Conductive Film (18404813)

Main Inventor

Jun HATAKEYAMA

Substrate with Film for Reflective Mask Blank, and Reflective Mask Blank (18505485)

Main Inventor

Tsuneo TERASAWA

LAMINATED STRUCTURE, SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING LAMINATED STRUCTURE (18287939)

Main Inventor

Takenori WATABE

LAMINATED STRUCTURE, SEMICONDUCTOR DEVICE, AND METHOD OF FORMING CRYSTALLINE OXIDE FILM (18693977)

Main Inventor

Takenori WATABE

WINDOW MATERIAL FOR OPTICAL ELEMENT, LID FOR OPTICAL ELEMENT PACKAGE, AND OPTICAL ELEMENT PACKAGE (18407974)

Main Inventor

Harunobu MATSUI

Q-SWITCH STRUCTURE AND METHOD OF PRODUCING Q-SWITCH STRUCTURE (18563971)

Main Inventor

Toshiaki WATANABE