View source for 20250233073. Low Resistivity Tungste (VEECO INSTRUMENTS .)

= LOW RESISTIVITY TUNGSTEN INTERCONNECT STRUCTURES =

'''Abstract''':
ion beam deposition processes, with assist or etch, that produce a tungsten interconnect and an inserted layer that can have a graduated composition in contact with an underlayer. the interconnect has the desirable alpha phase of the tungsten layer and a microstructure with highly oriented (110) grains with at least 95%, or at least 99% or 99.9% and even 100%, of the deposited tungsten thin film having a (110) crystalline orientation plane, relative to the top surface of the film.

'''Inventor(s)''': [[:Category:Rutvik J. MEHTA of Plainview NY US|Rutvik J. MEHTA]], [[:Category:Yuejing WANG of Plainview NY US|Yuejing WANG]], [[:Category:Robert CALDWELL of Plainview NY US|Robert CALDWELL]], [[:Category:Frank CERIO of Plainview NY US|Frank CERIO]]

'''CPC Classification''': [[:Category:CPC_H01L23/53257|H01L23/53257]] (SEMICONDUCTOR DEVICES NOT COVERED BY CLASS   (use of semiconductor devices for measuring ; resistors in general ; magnets, inductors or transformers ; capacitors in general ; electrolytic devices ; batteries or accumulators ; waveguides, resonators or lines of the waveguide type ; line connectors or current collectors ; stimulated-emission devices ; electromechanical resonators ; loudspeakers, microphones, gramophone pick-ups or like acoustic electromechanical transducers ; electric light sources in general ; printed circuits, hybrid circuits, casings or constructional details of electrical apparatus, manufacture of assemblages of electrical components ; use of semiconductor devices in circuits having a particular application, see the subclass for the application))


[[Category:Patent Applications]]
[[Category:VEECO INSTRUMENTS INC.]]
[[Category:CPC_H01L23/53257]]
[[Category:Rutvik J. MEHTA of Plainview NY US]]
[[Category:Yuejing WANG of Plainview NY US]]
[[Category:Robert CALDWELL of Plainview NY US]]
[[Category:Frank CERIO of Plainview NY US]]

[https://wikipatents.org/index.php?search=20250233073+rejection&title=Special%3ASearch&wprov=acrw1_-1 Search for rejections for patent application number 20250233073]


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