View source for 18890006. TEMPLATE AND MANUFACTURING METHOD THEREOF (Kioxia Corporation)

=TEMPLATE AND MANUFACTURING METHOD THEREOF=


==Organization Name==

[[:Category:Kioxia Corporation|Kioxia Corporation]]


[[Category:Kioxia Corporation]]

==Inventor(s)==

[[:Category:Takeharu Motokawa of Zushi Kanagawa (JP)|Takeharu Motokawa of Zushi Kanagawa (JP)]][[Category:Takeharu Motokawa of Zushi Kanagawa (JP)]]

[[:Category:Noriko Sakurai of Yokohama Kanagawa (JP)|Noriko Sakurai of Yokohama Kanagawa (JP)]][[Category:Noriko Sakurai of Yokohama Kanagawa (JP)]]

[[:Category:Hideaki Sakurai of Kawasaki Kanagawa (JP)|Hideaki Sakurai of Kawasaki Kanagawa (JP)]][[Category:Hideaki Sakurai of Kawasaki Kanagawa (JP)]]

==TEMPLATE AND MANUFACTURING METHOD THEREOF==


This abstract first appeared for US patent application 18890006 titled 'TEMPLATE AND MANUFACTURING METHOD THEREOF




==Original Abstract Submitted==

A template according to an embodiment includes a substrate and a first layer. The substrate includes a first face having a pattern, and contains a first element. The first layer is in contact with the first face, and contains a compound having the first element and a second element different from the first element, the density of the compound in the first layer being higher than the density of the compound in the substrate.



[[Category:G03F7/00]]
[[Category:B82Y40/00]]
[[Category:CPC_G03F7/0002]]