View source for 18883483. SEMICONDUCTOR STORAGE DEVICE (Kioxia Corporation)

=SEMICONDUCTOR STORAGE DEVICE=


==Organization Name==

[[:Category:Kioxia Corporation|Kioxia Corporation]]


[[Category:Kioxia Corporation]]

==Inventor(s)==

[[:Category:Tomohiro Kosugi of Yokkaichi Mie JP|Tomohiro Kosugi of Yokkaichi Mie JP]][[Category:Tomohiro Kosugi of Yokkaichi Mie JP]]

==SEMICONDUCTOR STORAGE DEVICE==


This abstract first appeared for US patent application 18883483 titled 'SEMICONDUCTOR STORAGE DEVICE

==Original Abstract Submitted==

According to one embodiment, a semiconductor storage device has a laminated body comprising conductive layers alternating with insulating layers in a first direction. A column extends into the laminated body and includes a first polycrystalline semiconductor film extending along the column in the first direction and a first insulating film extending along the column in the first direction. The first insulating film is between the conductive layers and the first polycrystalline semiconductor film. The first polycrystalline semiconductor film includes a first section corresponding in position along the first direction to an uppermost conductive layer among the conductive layers in the laminated body and a second section that is between the first section and a substrate in the first direction. An average grain diameter of the first section is smaller than an average grain diameter of the second section.



[[Category:H01L29/04]]
[[Category:H01L29/16]]
[[Category:H10B43/30]]
[[Category:CPC_H10D62/40]]