View source for 18748864. MAGNETIC SENSOR DEVICE (TDK CORPORATION)

=MAGNETIC SENSOR DEVICE=


==Organization Name==

[[:Category:TDK CORPORATION|TDK CORPORATION]]


[[Category:TDK CORPORATION]]

==Inventor(s)==

[[:Category:Kazuma Yamawaki of Tokyo (JP)|Kazuma Yamawaki of Tokyo (JP)]][[Category:Kazuma Yamawaki of Tokyo (JP)]]

==MAGNETIC SENSOR DEVICE==


This abstract first appeared for US patent application 18748864 titled 'MAGNETIC SENSOR DEVICE




==Original Abstract Submitted==

A magnetic sensor device  includes a support substrate  and a sensor substrate  fixed to the support substrate . The sensor substrate  includes a first surface B facing the support substrate  and a second surface A that is located on an opposite side to the first surface B and that is provided with a functional film  including a plurality of magnetic detection elements E, a hole portion  is formed in the first surface B, an outline O of the hole portion  includes at least one corner C, C, C . . . , at least one corner C, C, C . . . includes a first corner C that overlaps at least one of the plurality of magnetic detection elements E in a plan view seen in a plane-normal direction Z from the second surface A to the first surface B, and the first corner C has a radius of curvature of 5 μm or more.



[[Category:G01R33/09]]
[[Category:H10N50/10]]
[[Category:H10N50/80]]
[[Category:CPC_G01R33/098]]