View source for 18740567. MANUFACTURING DEVICE OF DISPLAY DEVICE (Japan Display Inc.)

=MANUFACTURING DEVICE OF DISPLAY DEVICE=


==Organization Name==

[[:Category:Japan Display Inc.|Japan Display Inc.]]


[[Category:Japan Display Inc.]]

==Inventor(s)==

[[:Category:Yuki Hamada of Tokyo (JP)|Yuki Hamada of Tokyo (JP)]][[Category:Yuki Hamada of Tokyo (JP)]]

[[:Category:Takanobu Takenaka of Tokyo (JP)|Takanobu Takenaka of Tokyo (JP)]][[Category:Takanobu Takenaka of Tokyo (JP)]]

[[:Category:Hirofumi Mizukoshi of Tokyo (JP)|Hirofumi Mizukoshi of Tokyo (JP)]][[Category:Hirofumi Mizukoshi of Tokyo (JP)]]

[[:Category:Masaru Takayama of Tokyo (JP)|Masaru Takayama of Tokyo (JP)]][[Category:Masaru Takayama of Tokyo (JP)]]

==MANUFACTURING DEVICE OF DISPLAY DEVICE==


This abstract first appeared for US patent application 18740567 titled 'MANUFACTURING DEVICE OF DISPLAY DEVICE




==Original Abstract Submitted==

According to one embodiment, a manufacturing device includes a main manufacturing line and a sub-line. The main manufacturing line includes a preprocessing portion, an in-line first evaporation device, a first CVD device for forming a first inorganic insulating layer of a sealing layer, a dry etching device for reducing a thickness of the first inorganic insulating layer, and a second CVD device for forming a second inorganic insulating layer of the sealing layer. The sub-line forms a detour which is different from the main manufacturing line as a conveyance path for conveying a processing substrate. The main manufacturing line and the sub-line form a loop conveyance path.



[[Category:H10K71/16]]
[[Category:CPC_H10K71/164]]