View source for 18706115. PROCESSING METHOD AND PROCESSING SYSTEM (Tokyo Electron Limited)

=PROCESSING METHOD AND PROCESSING SYSTEM=


==Organization Name==

[[:Category:Tokyo Electron Limited|Tokyo Electron Limited]]


[[Category:Tokyo Electron Limited]]

==Inventor(s)==

[[:Category:Kazuya Hisano of Koshi City, Kumamoto (JP)|Kazuya Hisano of Koshi City, Kumamoto (JP)]][[Category:Kazuya Hisano of Koshi City, Kumamoto (JP)]]

[[:Category:Yoshihiro Kawaguchi of Kikuchi-gun, Kumamoto (JP)|Yoshihiro Kawaguchi of Kikuchi-gun, Kumamoto (JP)]][[Category:Yoshihiro Kawaguchi of Kikuchi-gun, Kumamoto (JP)]]

[[:Category:Gousuke Shiraishi of Kikuchi-gun, Kumamoto (JP)|Gousuke Shiraishi of Kikuchi-gun, Kumamoto (JP)]][[Category:Gousuke Shiraishi of Kikuchi-gun, Kumamoto (JP)]]

==PROCESSING METHOD AND PROCESSING SYSTEM==


This abstract first appeared for US patent application 18706115 titled 'PROCESSING METHOD AND PROCESSING SYSTEM




==Original Abstract Submitted==

A processing method of processing a combined substrate in which a first substrate and a second substrate are bonded to each other includes: forming, by radiating interface laser light to an interface between the first substrate and the second substrate, a non-bonding region with reduced bonding strength at the interface; inspecting a forming state of the non-bonding region; forming a peripheral modification layer along a boundary between a peripheral portion and a central portion of the first substrate; and removing the peripheral portion starting from the peripheral modification layer. The inspecting of the forming state of the non-bonding region includes: imaging the non-bonding region with a camera; acquiring, from an obtained image of the non-bonding region, a distribution of gray values in a plan view of the non-bonding region; and inspecting the forming state of the non-bonding region by comparing the acquired gray values with a preset threshold value.



[[Category:B23K26/03]]
[[Category:B23K26/53]]
[[Category:B23K101/40]]
[[Category:G06T7/00]]
[[Category:G06T7/11]]
[[Category:H01L21/02]]
[[Category:CPC_B23K26/032]]