View source for 18463708. MEMS SENSOR AND MANUFACTURING METHOD THEREOF simplified abstract (ROHM CO., LTD.)

=MEMS SENSOR AND MANUFACTURING METHOD THEREOF=


==Organization Name==

[[:Category:ROHM CO., LTD.|ROHM CO., LTD.]]


[[Category:ROHM CO., LTD.]]

==Inventor(s)==

[[:Category:Yoshiyuki Inui of Kyoto (JP)|Yoshiyuki Inui of Kyoto (JP)]][[Category:Yoshiyuki Inui of Kyoto (JP)]]

[[:Category:Toma Fujita of Kyoto (JP)|Toma Fujita of Kyoto (JP)]][[Category:Toma Fujita of Kyoto (JP)]]

==MEMS SENSOR AND MANUFACTURING METHOD THEREOF - A simplified explanation of the abstract==


This abstract first appeared for US patent application 18463708 titled 'MEMS SENSOR AND MANUFACTURING METHOD THEREOF

==Simplified Explanation==

The present disclosure provides a MEMS sensor with a first substrate having a cavity and a second substrate bonded to the first substrate. The first substrate includes an electrode movably disposed in the cavity and a sealed member coupling to the second substrate. The second substrate includes a stop member for restricting the movement of the electrode toward the second substrate and a sealing member coupling to the sealed member. The sealed member is formed by a first metal layer on the first substrate, while the sealing member is formed by a second metal layer on the second substrate. A polycrystalline layer is formed on the stop member, which is disposed between the second substrate and the second metal layer.

* MEMS sensor with first and second substrates
* Electrode movably disposed in a cavity
* Sealed member and sealing member for coupling the substrates
* Stop member to restrict electrode movement
* Use of metal layers and polycrystalline layer for construction

== Potential Applications ==
The technology can be applied in:
* Automotive industry for airbag deployment systems
* Aerospace industry for altitude and pressure sensors
* Consumer electronics for motion detection in smartphones

== Problems Solved ==
* Improved accuracy and sensitivity in sensor measurements
* Enhanced durability and reliability in harsh environments
* Miniaturization of sensor components for compact devices

== Benefits ==
* High precision in detecting and measuring various parameters
* Long-lasting performance with minimal maintenance required
* Versatile applications across different industries

== Potential Commercial Applications ==
Optimizing the technology for:
* Medical devices for patient monitoring
* Industrial machinery for predictive maintenance
* Environmental monitoring for pollution control

== Possible Prior Art ==
One possible prior art could be the use of similar MEMS sensor technology in existing pressure sensors for industrial applications.

=== What is the manufacturing process for creating the polycrystalline layer on the stop member? ===

The manufacturing process involves depositing a thin film of polycrystalline material on the stop member using techniques such as chemical vapor deposition or physical vapor deposition.

=== How does the sealing member improve the overall performance of the MEMS sensor? ===

The sealing member helps to maintain a hermetic seal between the first and second substrates, preventing any external contaminants from affecting the sensor's operation and ensuring long-term stability and reliability.


==Original Abstract Submitted==

The present disclosure provides a MEMS sensor. The MEMS sensor includes a first substrate having a cavity and a second substrate bonded to the first substrate. The first substrate is provided with an electrode movably disposed in the cavity and a sealed member coupling to the second substrate. The second substrate is provided with a stop member for restricting a movement of the electrode toward the second substrate and a sealing member coupling to the sealed member. The sealed member is formed by a first metal layer on the first substrate. The sealing member is formed by a second metal layer on the second substrate. A polycrystalline layer is formed on the stop member. The polycrystalline layer is disposed between the second substrate and the second metal layer.



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