View source for 18463529. SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)

=SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM=


==Organization Name==

[[:Category:Kokusai Electric Corporation|Kokusai Electric Corporation]]


[[Category:Kokusai Electric Corporation]]

==Inventor(s)==

[[:Category:Shinichiro Mori of Toyama (JP)|Shinichiro Mori of Toyama (JP)]][[Category:Shinichiro Mori of Toyama (JP)]]

==SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM - A simplified explanation of the abstract==


This abstract first appeared for US patent application 18463529 titled 'SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM

==Simplified Explanation==

The present disclosure describes a technique for efficiently editing setting values in a file while ensuring consistency before and after changes. The technique involves a display for processing conditions, an operation controller for editing and undoing/redoing setting values, a controller for managing editing and storing operation history, a determinator for checking setting value ranges, and a process vessel for substrate processing based on the file.

* Explanation of the patent/innovation:
- Technique for editing setting values in a file efficiently
- Ensures consistency before and after changes
- Includes display, operation controller, controller, determinator, and process vessel
- Allows for undoing and redoing setting values
- Checks if setting values are within effective range

== Potential Applications ==
This technology could be applied in industries where precise control and management of processing conditions and setting values are crucial, such as semiconductor manufacturing, pharmaceutical production, and chemical processing.

== Problems Solved ==
1. Ensures consistency in setting values before and after changes
2. Efficiently manages and edits setting values in a file
3. Checks if setting values are within an effective range

== Benefits ==
1. Improved accuracy and precision in processing conditions
2. Enhanced control over setting values
3. Streamlined editing process for setting values

== Potential Commercial Applications ==
Optimizing Setting Values Editing Technique for Enhanced Processing Control

== Possible Prior Art ==
Prior art may include similar techniques for editing setting values in files or systems used in industries requiring precise control over processing conditions.

=== Unanswered Questions ===

=== How does this technique compare to existing methods for editing setting values in files? ===
This article does not provide a direct comparison to existing methods for editing setting values in files. It would be beneficial to understand the specific advantages and differences this technique offers compared to traditional methods.

=== What are the specific industries or applications where this technique would be most beneficial? ===
While the article mentions industries like semiconductor manufacturing and pharmaceutical production, it does not delve into the specific applications within these industries where this technique could have the most significant impact. Understanding the targeted applications could provide valuable insights into the potential success of this innovation in various sectors.


==Original Abstract Submitted==

According to the present disclosure, there is provided a technique capable of efficiently editing the file of the setting values while ensuring their consistency before and after change. There is provided a technique that includes: a display for a file describing processing conditions containing setting values; an operation controller for editing the file and undoing or redoing a setting value set in the editing; a controller for controlling an editing for the setting value and including: a memory storing the file and operation history information on the undo operation or the redo operation; and a determinator configured to determine whether or not the setting value is within an effective range when the setting value is reset during the undo operation or the redo operation; and a process vessel in which a substrate is processed based on the file stored in the memory.



[[Category:H01L21/67]]
[[Category:G11B27/031]]
[[Category:G11B27/34]]