View source for 18240007. SUBSTRATE PROCESSING APPARATUS AND METHOD simplified abstract (SEMES CO., LTD.)

=SUBSTRATE PROCESSING APPARATUS AND METHOD=


==Organization Name==

[[:Category:SEMES CO., LTD.|SEMES CO., LTD.]]


[[Category:SEMES CO., LTD.]]

==Inventor(s)==

[[:Category:Hyunjik Jung of Cheonan-si (KR)|Hyunjik Jung of Cheonan-si (KR)]][[Category:Hyunjik Jung of Cheonan-si (KR)]]

[[:Category:Yong Won Kim of Cheonan-si (KR)|Yong Won Kim of Cheonan-si (KR)]][[Category:Yong Won Kim of Cheonan-si (KR)]]

==SUBSTRATE PROCESSING APPARATUS AND METHOD - A simplified explanation of the abstract==


This abstract first appeared for US patent application 18240007 titled 'SUBSTRATE PROCESSING APPARATUS AND METHOD

==Simplified Explanation==

The substrate processing apparatus and method described in the patent application aim to prevent suction holes from being clogged due to airflow generated when a substrate is floated and printed. The apparatus includes a substrate stage for supporting the substrate and a treatment liquid ejection device mounted above the substrate stage to eject a treatment liquid onto the substrate. The substrate stage features a floating plate for floating at least a portion of the substrate and an airflow blocking member for blocking airflow flowing into the gap between the substrate and the floating plate.

* Substrate processing apparatus and method to prevent clogging of suction holes due to airflow during substrate floating and printing.
* Apparatus includes a substrate stage, treatment liquid ejection device, floating plate, and airflow blocking member.
* Floating plate supports the substrate while the airflow blocking member prevents airflow from entering the gap between the substrate and the floating plate.

== Potential Applications ==
The technology can be applied in industries such as semiconductor manufacturing, display panel production, and printed electronics.

== Problems Solved ==
Prevents clogging of suction holes during substrate processing, ensuring efficient and uninterrupted operation.

== Benefits ==
Enhanced substrate processing efficiency, reduced maintenance requirements, and improved overall productivity.

== Potential Commercial Applications ==
* Semiconductor manufacturing
* Display panel production
* Printed electronics

== Possible Prior Art ==
There may be prior art related to substrate processing apparatus with floating plates, but specific examples are not provided in the patent application.

== Unanswered Questions ==

=== How does the airflow blocking member effectively prevent clogging of suction holes? ===
The patent application mentions the airflow blocking member, but it does not detail the specific design or mechanism through which it achieves its intended purpose.

=== Are there any alternative methods to prevent clogging of suction holes during substrate processing? ===
The patent application focuses on the use of a floating plate and an airflow blocking member, but it does not explore other potential solutions or technologies that could address the same issue.


==Original Abstract Submitted==

Provided is a substrate processing apparatus and method capable of preventing suction holes from being clogged due to airflow generated when a substrate is floated and printed, and the substrate processing apparatus includes a substrate stage for supporting a substrate, and a treatment liquid ejection device mounted above the substrate stage to eject a treatment liquid onto the substrate, wherein the substrate stage includes a floating plate for floating at least a portion of the substrate, and an airflow blocking member for blocking at least a portion of a gap between the substrate and the floating plate to block airflow flowing into the gap.



[[Category:B41J11/00]]