View source for 18209649. SUBSTRATE SUPPORT (Applied Materials, Inc.)

=SUBSTRATE SUPPORT=


==Organization Name==

[[:Category:Applied Materials, Inc.|Applied Materials, Inc.]]


[[Category:Applied Materials, Inc.]]

==Inventor(s)==

[[:Category:Yogananda Sarode Vishwanath of Bangalore (IN)|Yogananda Sarode Vishwanath of Bangalore (IN)]][[Category:Yogananda Sarode Vishwanath of Bangalore (IN)]]

[[:Category:Xue Yang Chang of San Jose CA (US)|Xue Yang Chang of San Jose CA (US)]][[Category:Xue Yang Chang of San Jose CA (US)]]

==SUBSTRATE SUPPORT==


This abstract first appeared for US patent application 18209649 titled 'SUBSTRATE SUPPORT




==Original Abstract Submitted==

Substrate support components including an integrally formed insulator body including a first surface and a second surface opposite the first surface, and a thickness of the insulator body exceeds an arcing threshold between the first body and the second body when the insulator body is arranged between a first electrically conductive body and a second electrically conductive body. The insulator body includes gas conduits within the insulator body and forming a gas flow path from the first surface to the second surface, including a gas conductance plug embedded within a first portion of the gas conduit and having at least a threshold gas conductance through the gas conductance plug, wherein the gas conductance plug obstructs an electrical discharge path between the first body and the second body when the insulator body is arranged with respect to the first body and the second body.



[[Category:H01J37/32]]
[[Category:H01L21/683]]
[[Category:H01L21/687]]
[[Category:CPC_H01J37/32724]]