View source for 18202663. APPARATUS FOR MEASURING RADICAL DENSITY DISTRIBUTION BASED ON LIGHT ABSORPTION AND OPERATING METHOD THEREOF simplified abstract (Samsung Electronics Co., Ltd.)

=APPARATUS FOR MEASURING RADICAL DENSITY DISTRIBUTION BASED ON LIGHT ABSORPTION AND OPERATING METHOD THEREOF=


==Organization Name==

[[:Category:Samsung Electronics Co., Ltd.|Samsung Electronics Co., Ltd.]]


[[Category:Samsung Electronics Co., Ltd.]]

==Inventor(s)==

[[:Category:Sejin Oh of Suwon-si (KR)|Sejin Oh of Suwon-si (KR)]][[Category:Sejin Oh of Suwon-si (KR)]]

[[:Category:Sunggil Kang of Suwon-si (KR)|Sunggil Kang of Suwon-si (KR)]][[Category:Sunggil Kang of Suwon-si (KR)]]

[[:Category:Sangki Nam of Suwon-si (KR)|Sangki Nam of Suwon-si (KR)]][[Category:Sangki Nam of Suwon-si (KR)]]

[[:Category:Jeongmin Bang of Suwon-si (KR)|Jeongmin Bang of Suwon-si (KR)]][[Category:Jeongmin Bang of Suwon-si (KR)]]

[[:Category:Dougyong Sung of Suwon-si (KR)|Dougyong Sung of Suwon-si (KR)]][[Category:Dougyong Sung of Suwon-si (KR)]]

[[:Category:Yeongkwang Lee of Suwon-si (KR)|Yeongkwang Lee of Suwon-si (KR)]][[Category:Yeongkwang Lee of Suwon-si (KR)]]

[[:Category:Sungho Jang of Suwon-si (KR)|Sungho Jang of Suwon-si (KR)]][[Category:Sungho Jang of Suwon-si (KR)]]

[[:Category:Jonghun Pi of Suwon-si (KR)|Jonghun Pi of Suwon-si (KR)]][[Category:Jonghun Pi of Suwon-si (KR)]]

==APPARATUS FOR MEASURING RADICAL DENSITY DISTRIBUTION BASED ON LIGHT ABSORPTION AND OPERATING METHOD THEREOF - A simplified explanation of the abstract==


This abstract first appeared for US patent application 18202663 titled 'APPARATUS FOR MEASURING RADICAL DENSITY DISTRIBUTION BASED ON LIGHT ABSORPTION AND OPERATING METHOD THEREOF

==Simplified Explanation==

The apparatus described in the patent application is designed to measure radical spatial density distribution using a process chamber, a moving wall, a light source, a collimator, and a spectrometer. The collimator transmits light to the moving wall and receives reflected light, which is then analyzed by the spectrometer to determine radical spatial density based on the absorption amount of the spectrum of the received light.

* Process chamber with a viewport
* Driving device to move a moving wall
* Light source for generating light
* Collimator for transmitting and receiving light
* Spectrometer for analyzing reflected light

== Potential Applications ==
This technology could be used in various industries such as semiconductor manufacturing, environmental monitoring, and chemical analysis.

== Problems Solved ==
This apparatus solves the problem of accurately measuring radical spatial density distribution in a controlled environment.

== Benefits ==
The benefits of this technology include precise measurements, real-time data analysis, and improved understanding of radical spatial density distribution.

== Potential Commercial Applications ==
One potential commercial application of this technology could be in the development of advanced semiconductor manufacturing processes.

== Possible Prior Art ==
One possible prior art for this technology could be similar apparatus used in scientific research labs for analyzing light absorption and reflection in various materials.

=== Unanswered Questions ===

=== How does this technology compare to existing methods for measuring radical spatial density distribution? ===
This article does not provide a direct comparison between this technology and existing methods for measuring radical spatial density distribution. 

=== What are the limitations of this apparatus in terms of measuring radical spatial density distribution? ===
This article does not address any potential limitations of the apparatus in measuring radical spatial density distribution.


==Original Abstract Submitted==

Provided is an apparatus configured to measure radical spatial density distribution including a process chamber including a viewport, a driving device configured to move a moving wall inside the process chamber, a light source configured to generate light, a collimator disposed in the viewport of the process chamber and configured to transmit light received from the light source to the moving wall and receive light reflected from the moving wall, and a spectrometer configured to receive the reflected light from the collimator, and measure radical spatial density based on analyzing an absorption amount of a spectrum of the received light.



[[Category:G01N21/25]]
[[Category:G01N21/31]]
[[Category:H01L21/67]]